1. All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications
- Author
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Yajun Zhong, Lianghui Du, Qiao Liu, Liguo Zhu, Yi Zou, and Bin Zhang
- Subjects
All-silicon metasurface ,sharp resonance ,refractive index sensing ,graphene sensing ,Applied optics. Photonics ,TA1501-1820 ,Optics. Light ,QC350-467 - Abstract
The all silicon terahertz metasurface with sharp Fano resonance and its sensing applications with high Q factor have been investigated. Such metasurface, composed of periodic grooves, can be fabricated by deep silicon etching on high-resistivity silicon. When the refractive index of the sample changes, the shifted resonance frequency appears and the resonance intensity can be modulated by altering the surface conductivity. The Q characteristics of the metasurface and the applications of graphene sensing are then analyzed and verified. The results indicates that the Q factor of the metasurface can reach 39857, the standard sensitivity is 16042 nm/RIU, and the FOM is 533. Meanwhile, the characteristics of sensing graphene samples (∼1 nm) are very useful for sensing other ultra-thin materials or biomolecules.
- Published
- 2021
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