Author: "Aihua Dong" / Topic: backscattering - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Aihua Dong" Topic backscattering

Author: Weilin, Jiang, Peiran, Zhu, Aihua, Dong, and Shiduan, Yin
Subjects: *NITROGEN, *SILICON, *OXYGEN, *SILICON nitride, *BACKSCATTERING
Abstract: Presents information on a study which described a method for the analysis of concentration ratios of nitrogen and silicon, and oxygen and silicon in silicon nitride and oxide layers on silicon substrate using proton elastic backscattering. Methods; Results; Discussion.
Published: 1991
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