Search

Numerous techniques are used to explain the microstructural, surface morphology and the optical properties of barium strontium titanate ([Ba.sub.0.5][Sr.sub.0.5Ti[O.sub.3] or BST) films deposited by the pulsed laser deposition technique. The films explained are found to be extremely helpful, as they can be widely used for several low loss waveguide, as well as different advanced optical integrated systems.

The effect of surface chemistry in plasma etching of multicomponent oxides is examined by the measurements of the ion energy dependence of the etch yield. In the case of CBN films etched in an inductively coupled [Cl.sub.2] plasma, the studies have shown that the chlorine uptake is inhibiting the etching reaction, with the desorption of nonvolatile Nb[Cl.sub.2] and Ba[Cl.sub.2] compounds being the rate-limiting step.