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The structures of Cr/Be multilayer mirror interfaces are investigated using X‐ray reflectometry, diffuse X‐ray scattering and atomic force microscopy. The combination of these methods makes it possible to separate the contributions of roughness and interlayer diffusion/intermixing for each sample. In the range of period thicknesses of 2.26–0.8 nm, it is found that the growth roughness of the Cr/Be multilayer mirrors does not depend on the period thickness and is ∼0.2 nm. The separation of roughness and diffuseness allows estimation of layer material intermixing and the resulting drop in the optical contrast, which is from 0.85 to 0.17 in comparison with an ideally sharp structure. [ABSTRACT FROM AUTHOR]

In this work, the refractive index of beryllium in the photon energy range 20.4–250 eV was experimentally determined. The initial data include measurements of the transmittance of two free‐standing Be films with thicknesses of 70 nm and 152 nm, as well as reflectometric measurements of similar films on a substrate. Measurements were carried out at the optics beamline of the BESSY II synchrotron radiation source. The absorption coefficient β was found directly from the transmission coefficient of the films, and the real part of the polarizability δ was calculated from the Kramers–Kronig relations. A comparison is carried out with results obtained 20 years ago at the ALS synchrotron using a similar methodology. [ABSTRACT FROM AUTHOR]

Mo/Be multilayers are promising optical elements for extreme ultraviolet (EUV) lithography and space optics. Experimentally derived optical constants are necessary for accurate and reliable design of beryllium-containing optical coatings. We report optical constants of beryllium derived from synchrotron radiation-based reflectivity data of Mo/Be multilayers. Results are in good agreement with available data in the literature obtained from the well-known absorption measurements of beryllium thin films or foils. We demonstrate synchrotron based at-wavelength reflectometry as an accurate and non-destructive technique for deriving EUV optical constants for materials that are difficult or unstable to make thin foils for absorption measurements. [ABSTRACT FROM AUTHOR]