1. Electron beam-induced current imaging with two-angstrom resolution
- Author
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Mecklenburg, Matthew, Hubbard, William A, Lodico, Jared J, and Regan, BC
- Subjects
Physical Sciences ,Condensed Matter Physics ,Bioengineering ,Electrons ,Microscopy ,Electron ,Scanning ,Aberration-correction ,Transmission electron microscopy ,Secondary electrons ,STEM ,EBIC ,Atomic ,Molecular ,Nuclear ,Particle and Plasma Physics ,Optical Physics ,Other Physical Sciences ,Microscopy ,Biochemistry and cell biology ,Physical chemistry ,Condensed matter physics - Abstract
An electron microscope's primary beam simultaneously ejects secondary electrons (SEs) from the sample and generates electron beam-induced currents (EBICs) in the sample. Both signals can be captured and digitized to produce images. The off-sample Everhart-Thornley detectors that are common in scanning electron microscopes (SEMs) can detect SEs with low noise and high bandwidth. However, the transimpedance amplifiers appropriate for detecting EBICs do not have such good performance, which makes accessing the benefits of EBIC imaging at high-resolution relatively more challenging. Here we report lattice-resolution imaging via detection of the EBIC produced by SE emission (SEEBIC). We use an aberration-corrected scanning transmission electron microscope (STEM), and image both microfabricated devices and standard calibration grids.
- Published
- 2019