1. Monolithic resonant-cantilever-based CMOS microsystem for biochemical sensing
- Author
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Li, Yue, Vancura, Cyril, Kirstein, Kay-Uwe, Lichtenberg, Jan, and Hierlemann, Andreas
- Subjects
Complementary metal oxide semiconductors -- Design and construction ,Chemical detectors -- Design and construction ,Biosensors -- Design and construction ,Business ,Computers and office automation industries ,Electronics ,Electronics and electrical industries - Abstract
A resonant cantilever-based microsystem aimed at biochemical sensing is presented. The sensor system comprises a magnetically actuated resonant cantilever sensor array integrated with the feedback circuitry, digital control circuitry and a serial interface on a single chip in 0.8 [micro]m CMOS technology. The sensor system shows a frequency stability of better than 3 Hz in water corresponding to a detection limit of about 30 pg mass loading. The system has been used for the detection of antibody-antigen interaction on the cantilever surface. The possibility to actuate and operate cantilever arrays in a liquid environment opens up a variety of new applications for bio-chemical sensing. Index Terms--Biosensor, chemical sensor, CMOS, liquid phase, monolithic integration, resonant cantilever.
- Published
- 2008