1. Perovskite Nickelate Actuators
- Author
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Xuegang Chen, Samuel Peana, Shriram Ramanathan, Dana Weinstein, Jackson Anderson, and Chengzi Huang
- Subjects
Microelectromechanical systems ,Cantilever ,Materials science ,business.industry ,Mechanical Engineering ,Finite element method ,Stress (mechanics) ,Deflection (engineering) ,Optoelectronics ,Electrical and Electronic Engineering ,Thin film ,business ,Actuator ,Perovskite (structure) - Abstract
Micro-robotics is a burgeoning field, with potential applications in search and rescue, smart dust, advanced additive manufacturing and micro-surgery. A critical component enabling micro-robotic systems is efficient actuator materials. In this work we introduce thin films of NdNiO3, a prototypical perovskite nickelate, as a potential material for MEMS actuation, providing up to 6.0% tensile volumetric strain via hydrogen-ion intercalation, resulting in an experimentally demonstrated output work density of 6.7 J/cm3 and stress output in excess of 1.1 GPa via a unique hydrogen doping mechanism. Separately, a stiffened cantilever array is fabricated to measure experimental tip deflection, which matches expected deflections from a developed finite element analysis model. [2020-0330]
- Published
- 2021
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