1. Contact Properties of ZnO/Cu Films with MSM Structure
- Author
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李清山 Li Qing-shan, 董艳锋 Dong Yan-feng, 张立春 Zhang Li-chun, and 宋连科 Song Lian-ke
- Subjects
Radiation ,Materials science ,business.industry ,Electrode ,Optoelectronics ,Conductivity ,Condensed Matter Physics ,business ,Layer (electronics) ,Ohmic contact ,Electronic, Optical and Magnetic Materials ,Pulsed laser deposition - Abstract
Considering the good conductivity and anti-electromigration and low price,Cu films were prepared as electrodes of ZnO-based devices via pulsed laser deposition method on Si(111) substrates.The XRD and SEM images of ZnO/Cu films were examined and the current-voltage characteristics were measured.The results exhibit that ZnO films are highly c-axis oriented,and Cu films are highly(111) oriented.Ohmic contact can be obtained when the ZnO∶Cu layer was involved between the ZnO film and the Cu film,and the Ohmic contact properties can be improved after annealing.Study on how to improve the properties of Ohmic contact of the ZnO/Cu films is still continued.The results indicate that Cu may be used as Ohmic contact electrodes for ZnO-based devices.
- Published
- 2012
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