1. Micro-Opto-Electro-Mechanical Device Based on Flexible β-Ga2O3 Micro-Lamellas
- Author
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T. S. Monteiro, Emilio Nogales, Kiyoshi Shimamura, Katharina Lorenz, Manuel Alonso-Orts, Bianchi Méndez, Marco Peres, Encarnación G. Víllora, Auguste Fernandes, Eduardo Alves, Luís Alves, Susana Cardoso, and Filipe J. Oliveira
- Subjects
010302 applied physics ,Quenching ,Materials science ,Photoluminescence ,Física de materiales ,business.industry ,Joule effect ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Thermal expansion ,Electronic, Optical and Magnetic Materials ,Condensed Matter::Materials Science ,Semiconductor ,Física del estado sólido ,0103 physical sciences ,Optoelectronics ,0210 nano-technology ,business ,Joule heating ,Luminescence ,Excitation - Abstract
A thermal actuator based on thin flexible lamellas of Ga_2O_3 was designed in order to demonstrate the potential of this semiconductor for micro-opto-electro-mechanical applications (MOEMs). The working principle of these devices is based on the thermal expansion that induces a vertical movement resultant of the lamella elongation due the self-heating/Joule effect. Upon excitation with photons, electrons or ions, intrinsic luminescence bands associated with self-trapped excitons and donor-acceptor pair recombination dominate the emission spectrum. When a current passes through the device, simultaneously with the thermal expansion, this luminescence is strongly quenched. Based on systematic Photoluminescence and Raman studies as a function of temperature and as a function of the applied power it is demonstrated that the observed luminescence quenching is directly related with the Joule heating effect. This work presents for the first time a thermal actuator based on Ga_2O_3 and it intends to be a stimulus for future works on MOEMs applications based on this semiconductor.
- Published
- 2019
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