1. Micro-Cantilever Capacitive Sensor for High-Resolution Measurement of Electric Fields
- Author
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Fen Xue, Guangzhao Yang, Han Zhifei, Jinliang He, Zhanqing Yu, and Jun Hu
- Subjects
Cantilever ,Materials science ,business.industry ,Capacitive sensing ,010401 analytical chemistry ,Electrical engineering ,01 natural sciences ,Capacitance ,Piezoelectricity ,0104 chemical sciences ,Power (physics) ,Electric power system ,Electric field ,Electrical and Electronic Engineering ,business ,Instrumentation ,Microfabrication - Abstract
Electric-field (EF) microsensors with high resolution are crucial for the realization of real-time dynamic status monitoring of Ubiquitous Power Internet of Things (UPIoT), which is of great significance for the safe operation of power system and early-stage diagnostics of power equipment. Distortion-free and high-resolution measurement of electric fields is also important in applications such as meteorological monitoring and aerospace launch. Existing electric-field measurement methods are always costly, bulky, and low in resolution. We presented a capacitive EF sensor with small size and high resolution. The presented sensor is based on piezoelectric effect, and a micro cantilever structure is realized using microfabrication. Simulation and experimental results indicate that the presented sensor has a resolution of about 45 V/m and a measurable magnitude of over 1.5 MV/m. Owing to the characteristics of small size, low cost and low power consumption, the EF sensor is suitable for applications of large-scale sensing arrays.
- Published
- 2021