Search

Immersion lithography has drawn tons of interests as a potential solution for sub-65nm patterning. High refractive index liquid, which is filled in the gap between exposure lens and a photoresist, can improve a resolution through increased effective numerical aperture (NA) of the exposure system. Most attractive liquid for this purpose is water. Our works were conducted as a part of the basic study for immersion lithography and aimed for the verification of leached resist components by water. It was observed that leaching relies largely on the free volume of a polymer and anion size of photoacid generator (PAG). The larger free volume and the smaller anion, the larger T-top resist profile was generated. Additionally, effects of solvents, quenchers and polarity of the polymer were investigated. Detailed results will be reported in this paper.

Beyond the computer networking, the wired Internet and mobile Internet penetrate deeply in all kinds of information processing systems and applications. Web-based services with wired Internet and mobile Internet should be considered for convenient user interface for the disabled and elderly people without any gap of the Digital Divide. The Web server for knowledge and information should be unified as a center for real-time information network in the milieu of ubiquitous computing. We studied the performance analysis of user interface for the disabled in real-time ubiquitous information network based on wired and mobile Internet.

The wired Internet has influenced many areas in human society, especially the speed of knowledge and information exchange; the mobile Internet is affecting much more in pervasive computing environment and will introduce many special applications like health-care based on the wireless health-monitoring network. We considered the mobile Internet for the real-time health-monitoring network for the disabled and elderly people as inexpensive and effective system, especially with health-monitoring mobile devices. We studied the Web-based health information network, and discuss the empirical results about performance with emulated model considering the implementation with the real-time information Web server for the disabled and elderly people.