1. Toward Large-Scale Ga2O3 Membranes via Quasi-Van Der Waals Epitaxy on Epitaxial Graphene Layers
- Author
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Boon S. Ooi, Kyoungho Kim, Jae-Seong Lee, Si-Young Bae, Seong-Min Jeong, Yonghyeon Kim, Jung-Hong Min, Kwang Jae Lee, Chun Hong Kang, Dong-Seon Lee, Tien Khee Ng, Kuang-Hui Li, and Jung-Wook Min
- Subjects
Materials science ,solar-blind photodetectors ,02 engineering and technology ,Epitaxy ,01 natural sciences ,law.invention ,Ga2O3 ,symbols.namesake ,law ,0103 physical sciences ,energy release rate ,General Materials Science ,Electroplating ,010302 applied physics ,van der Waals epitaxy ,business.industry ,Graphene ,021001 nanoscience & nanotechnology ,epitaxial graphene ,Exfoliation joint ,Membrane ,Semiconductor ,membranes ,symbols ,Optoelectronics ,van der Waals force ,0210 nano-technology ,business ,Layer (electronics) ,Research Article - Abstract
Epitaxial growth using graphene (GR), weakly bonded by van der Waals force, is a subject of interest for fabricating technologically important semiconductor membranes. Such membranes can potentially offer effective cooling and dimensional scale-down for high voltage power devices and deep ultraviolet optoelectronics at a fraction of the bulk-device cost. Here, we report on a large-area β-Ga2O3 nanomembrane spontaneous-exfoliation (1 cm × 1 cm) from layers of compressive-strained epitaxial graphene (EG) grown on SiC, and demonstrated high-responsivity flexible solar-blind photodetectors. The EG was favorably influenced by lattice arrangement of SiC, and thus enabled β-Ga2O3 direct-epitaxy on the EG. The β-Ga2O3 layer was spontaneously exfoliated at the interface of GR owing to its low interfacial toughness by controlling the energy release rate through electroplated Ni layers. The use of GR templates contributes to the seamless exfoliation of the nanomembranes, and the technique is relevant to eventual nanomembrane-based integrated device technology.
- Published
- 2021
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