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3 results on '"Amine Rekik"'

1. Study of Low-Cost Electrical Test Strategies for Post-Silicon Yield Improvement of MEMS Convective Accelerometers

Author

Florence Azaïs, Pascal Nouet, Ahmed Amine Rekik, Frédérick Mailly, Département de Génie Électrique de Sfax [ENIS] (CEM Lab - ENIS), École Nationale d'Ingénieurs de Sfax | National School of Engineers of Sfax (ENIS), Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier (LIRMM), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), TEST (TEST), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), and Smart Integrated Electronic Systems (SmartIES)

Subjects
Engineering, Wheatstone bridge, Population, Convective accelerometer, Accelerometer, law.invention, Performance binning, law, Calibration, Electronic engineering, Sensitivity (control systems), Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, education, Electrical impedance, Microelectromechanical systems, education.field_of_study, Heating element, business.industry, CMOS, Electrical calibration SELF-TEST, SENSOR, Yield improvement, MEMS, business, GENERATION
Abstract

International audience; In this paper, different strategies for post-silicon yield improvement of MEMS convective accelerometers are explored. A key feature of the proposed strategies is that they can be implemented at low-cost using electrical test equipment since they only rely on the measurement of the relative deviation of Wheatstone bridge impedance due to power dissipation in the heating element. Different electrical test flows are defined that implement either sensitivity binning, sensitivity calibration, or both. Optionally, an additional constraint can be inserted in the test flows in case power consumption performance has also to be satisfied in addition to sensitivity. The efficiency of the different strategies is evaluated and discussed considering a population of 1,000 devices generated through Monte-Carlo simulation. Finally, experimental measurements that validate the calibration principle are presented.

Published
2014

2. A MEMS Convective Accelerometer Equipped with On-Chip Facilities for Sensitivity Electrical Calibration

Author

Norbert Dumas, Florence Azaïs, Ahmed Amine Rekik, Frédérick Mailly, Pascal Nouet, Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier (LIRMM), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), Département de Génie Électrique de Sfax [ENIS] (CEM Lab - ENIS), École Nationale d'Ingénieurs de Sfax | National School of Engineers of Sfax (ENIS), Conception et Test de Systèmes MICroélectroniques (SysMIC), and Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)

Subjects
Microelectromechanical systems, Engineering, business.industry, Process (computing), 02 engineering and technology, 021001 nanoscience & nanotechnology, Accelerometer, 020202 computer hardware & architecture, Power (physics), Generator (circuit theory), 0202 electrical engineering, electronic engineering, information engineering, Electronic engineering, Calibration, Sensitivity (control systems), [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, Electrical impedance
Abstract

International audience; In this paper, we propose an alternate electrical-only strategy to perform both test and calibration of MEMS convective accelerometers' sensitivity. The idea is calibrate device sensitivity through the adjustment of the power dissipated in the heater element. For this, the system is equipped with an on-chip programmable digital pulse modulated generator and an iterative search procedure based on simple impedance measurements is implemented. The method is evaluated through Monte-Carlo simulations considering typical process variations and results are presented to demonstrate the potentialities of the technique.

Published
2012

3. A Behavioral Model of MEMS Convective Accelerometers for the Evaluation of Design and Calibration Strategies at System Level

Author

Florence Azaïs, Frédérick Mailly, Ahmed Amine Rekik, Pascal Nouet, Norbert Dumas, Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier (LIRMM), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), Département de Génie Électrique de Sfax [ENIS] (CEM Lab - ENIS), École Nationale d'Ingénieurs de Sfax | National School of Engineers of Sfax (ENIS), Conception et Test de Systèmes MICroélectroniques (SysMIC), and Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)

Subjects
010302 applied physics, Microelectromechanical systems, Engineering, business.industry, System-level simulation, 02 engineering and technology, 021001 nanoscience & nanotechnology, Accelerometer, 01 natural sciences, Finite element method, Design for manufacturability, Behavioral modeling, Robustness (computer science), 0103 physical sciences, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, Electrical conductor, Simulation
Abstract

International audience; This paper presents a behavioral model that can be used to improve the manufacturability of systems based on MEMS convective sensors. This model permits to handle faults related to process scattering, taking into account not only the electrical and lateral geometrical parameters but also the influence of the cavity depth. Moreover correlations between conductive and convective phenomena are included. The model is validated with respect to FEM simulations and a very good agreement is obtained between the behavioral model and FEM results. The proposed model can then be used in system-level simulations, for instance to evaluate the impact of process scattering on the performances of the sensing part and/or to investigate different design and calibration strategies with respect to the system robustness.

Published
2011

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