1. Study of Low-Cost Electrical Test Strategies for Post-Silicon Yield Improvement of MEMS Convective Accelerometers
- Author
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Florence Azaïs, Pascal Nouet, Ahmed Amine Rekik, Frédérick Mailly, Département de Génie Électrique de Sfax [ENIS] (CEM Lab - ENIS), École Nationale d'Ingénieurs de Sfax | National School of Engineers of Sfax (ENIS), Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier (LIRMM), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), TEST (TEST), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), and Smart Integrated Electronic Systems (SmartIES)
- Subjects
Engineering ,Wheatstone bridge ,Population ,Convective accelerometer ,Accelerometer ,law.invention ,Performance binning ,law ,Calibration ,Electronic engineering ,Sensitivity (control systems) ,Electrical and Electronic Engineering ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,education ,Electrical impedance ,Microelectromechanical systems ,education.field_of_study ,Heating element ,business.industry ,CMOS ,Electrical calibration SELF-TEST ,SENSOR ,Yield improvement ,MEMS ,business ,GENERATION - Abstract
International audience; In this paper, different strategies for post-silicon yield improvement of MEMS convective accelerometers are explored. A key feature of the proposed strategies is that they can be implemented at low-cost using electrical test equipment since they only rely on the measurement of the relative deviation of Wheatstone bridge impedance due to power dissipation in the heating element. Different electrical test flows are defined that implement either sensitivity binning, sensitivity calibration, or both. Optionally, an additional constraint can be inserted in the test flows in case power consumption performance has also to be satisfied in addition to sensitivity. The efficiency of the different strategies is evaluated and discussed considering a population of 1,000 devices generated through Monte-Carlo simulation. Finally, experimental measurements that validate the calibration principle are presented.
- Published
- 2014