1. Micro Glass Blowing platform for microfabrication of microoptical components
- Author
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Christophe Gorecki, J. Vincente Carrion, Sylwester Bargiel, and Nicolas Passilly
- Subjects
Materials science ,business.industry ,Borosilicate glass ,Physics::Optics ,Conical surface ,Axicon ,symbols.namesake ,Fabrication methods ,symbols ,Miniaturization ,Optoelectronics ,business ,Bessel function ,Silicon micromachining ,Microfabrication - Abstract
The specific conical shape of the axicon makes them well suited for the generation of so-called Bessel beams. We present here a technological micro-glass blowing platform developed for miniaturization of micro-optical components. This employs the glass-blowing process, silicon micromachining and heterogeneous bonding. Here, we focus on the unconventional fabrication methods of micro-optical components in borosilicate glass. As an example, an original concept of a micro-machined micro-axicons for generation of Bessel beams is demonstrated and experimentally validated.
- Published
- 2018
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