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We proposed a design and sacrificial-based fabrication process of capacitive pressure sensor with SiGe as a structural layer and movable electrode. Simulated results showed that its sensitivity was around 15fF/bar in a full-scale span from 30 to 110kPa. The initial stress for the used materials was also discussed in this study. At a low deposition temperature of SiGe (

Recently, there is a rising interest in smart grid operating system which manages various types of distributed generation, smart meters, and electric vehicles with power grid. Considering the features of smart grid environment, the interoperability should be one of the important factors to build smart grid environment successfully. To secure interoperability, smart grid operating system should conform to some standards in terms of the data representation and communication. CIM and OPC-UA are the international standards widely used in smart grid domain for enabling interoperability. They provide common information model and the unified architecture for communicating between each systems or applications. In this paper, we illustrate a smart grid operating system that we have developed to secure interoperability between not only applications but also numerous legacy systems(applications) by implementing CIM based information model and OPC-UA based communication interface services.

This paper presents the design and implementation of an embedded motion controller for industrial applications. The proposed control system has many advanced functions, including: high flexibility, high performance motion profile planning and multiple axis interpolation calculation. A high performance DSP and a FPGA chip are used for processing all demanded tasks in real-time.