1. Characteristics of Ceramic Coatings Made by Thin Film Low Pressure Plasma Spraying (LPPS-TF).
- Author
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Hospach, Andreas, Mauer, Georg, Vaßen, Robert, and Stöver, Detlev
- Subjects
PLASMA spraying ,CERAMIC coating ,PHYSICAL vapor deposition ,THIN film capacitors ,SUBSTRATES (Materials science) - Abstract
The thin film low pressure plasma spray process (LPPS-TF) has been developed with the aim of efficient depositing uniform and thin coatings with large area coverage by plasma spraying. At high power input (~150 kW) and very low pressure (~100 Pa) the plasma jet properties change considerably and it is even possible to evaporate the powder feedstock material providing advanced microstructures of the deposits. This relatively new technique bridges the gap between conventional plasma spraying and physical vapor deposition. In addition, the resulting microstructures are unique and can hardly be obtained by other processes. In this paper, microstructures made by LPPS-TF are shown and the columnar layer growth by vapor deposition is demonstrated. In addition to the ceramic materials TiO, AlO or MgAlO, the focus of the research was placed on partially yttria-stabilized zirconia. Variations of the microstructures are shown and discussed concerning potential coating applications. [ABSTRACT FROM AUTHOR]
- Published
- 2012
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