1. Effects of β-Si 3 N 4 Seeds on Microstructure and Performance of Si 3 N 4 Ceramics in Semiconductor Package.
- Author
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Shen, Qiang, Lin, Zhijie, Deng, Junjie, Chen, Hongxiang, Chen, Xuan, Tian, Jun, Bao, Biliang, Dai, Pinqiang, and Sun, Xudong
- Subjects
THERMAL shock ,MICROSTRUCTURE ,CERAMIC materials ,VICKERS hardness ,FRACTURE toughness ,SILICON nitride ,CERAMICS - Abstract
Among the various ceramic substrate materials, Si
3 N4 ceramics have demonstrated high thermal conductivity, good thermal shock resistance, and excellent corrosion resistance. As a result, they are well-suited for semiconductor substrates in high-power and harsh conditions encountered in automobiles, high-speed rail, aerospace, and wind power. In this work, Si3 N4 ceramics with various ratios of α-Si3 N4 and β-Si3 N4 in raw powder form were prepared by spark plasma sintering (SPS) at 1650 °C for 30 min under 30 MPa. When the content of β-Si3 N4 was lower than 20%, with the increase in β-Si3 N4 content, the ceramic grain size changed gradually from 1.5 μm to 1 μm and finally resulted in 2 μm mixed grains. However, As the content of β-Si3 N4 seed crystal increased from 20% to 50%, with the increase in β-Si3 N4 content, the ceramic grain size changed gradually from 1 μm and 2 μm to 1.5 μm. Therefore, when the content of β-Si3 N4 in the raw powder is 20%, the sintered ceramics exhibited a double-peak structure distribution and the best overall performance with a density of 97.5%, fracture toughness of 12.1 MPa·m1/2 , and a Vickers hardness of 14.5 GPa. The results of this study are expected to provide a new way of studying the fracture toughness of silicon nitride ceramic substrates. [ABSTRACT FROM AUTHOR]- Published
- 2023
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