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Abstract In this paper, an integrated component of the three-electrode planar switch and the exploding foil bridge was fabricated on the ceramic substrate by the magnetron sputtering process and wet etching process, which was beneficial to the miniaturization, low energy and integration of the explosion foil initiator system. We discussed the self-breakdown voltage of the three-electrode planar switch under different structural parameters and established the formula of self-breakdown voltage. By testing the discharge performance of the integrated component under a charging voltage of 1300 V~1500 V, we obtained a delay time of about 300 ns for the component, which is lower than the delay time when the spark gap switch is used. This result showed that the inductance of the entire circuit was lower than the inductance of the conventional circuit. We conducted a preliminary study on whether the integrated components are affected by changing of the working environment. Finally, based on this integrated component, we have used LTCC technology to produce a new highly integrated EFI system. Highlights • The integrated component we designed is suitable for exploding foil initiator system. • We discussed the SBV of the planar switch under different structural parameters and established the formula of SBV. • We have prepared a new highly integrated EFI system using LTCC technology based on the integrated components designed. [ABSTRACT FROM AUTHOR]