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Start Over Author "BIRDSALL, C. K." Topic charge exchange
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1. A one-dimensional collisional model for plasma-immersion ion implantation.

Author

Vahedi, V., Lieberman, M. A., Alves, M. V., Verboncoeur, J. P., and Birdsall, C. K.

Subjects
PLASMA gases, IONS, CHARGE exchange
Abstract

Focuses on a general one-dimensional model to study the plasma-immersion ion implantation process in different coordinate systems. Analytic expressions for normal ion velocity distribution and other parameters; Effect of a charge-exchange collision on an ion; Equation concerning the average ion velocity at the target.

Published
1991
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