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In this study, scandia-stabilized zirconia (ScSZ) electrolyte thin-film layers were deposited via chemical solution deposition (CSD). We selected 10ScSZ (10% Sc 2 O 3 , 90% ZrO 2 molar ratio) as the target material, and the precursor solution was prepared by precise calculations. The 10ScSZ solution was deposited on Al2O3 substrate using a spin-coating method. Then, the substrate was sintered using two methods: flash light irradiation and thermal. The characteristics of the thin films were compared, including ionic conductivity, surface morphology, and chemical composition. Pulsed light sintering was applied in the sintering step under a variety of energy density conditions from 80 to 130 J/ cm 2 , irradiation on/off times of 10 ms and 10 ms/500 ms, number of pulses, and bottom heat from 300 to 600 °C. The ionic conductivity of the ScSZ electrolyte layers fabricated by thermal or flash light irradiation methods was tested and compared. The results show that the ScSZ electrolyte layer sintered by flash light irradiation within a few seconds of process time had similar ionic conductivity to the electrolyte layer that was thermal sintered for about 10 h including cooling process. [ABSTRACT FROM AUTHOR]

In this paper, we demonstrate the practicality and feasibility of the flash light-sintering method to fabricate the ceramic material perovskite structure for lanthanum nickel oxide (LaNiO3; LNO) thin films using flash light irradiation equipment. LNO thin films are deposited on an Si wafer and Al2O3 substrate via the chemical solution deposition (CSD) method and sintered by a thermal and flash light-irradiation process with a bottom heater. The properties of flash light-sintered LNO thin films are compared with those of thermally sintered films. The surface morphology, crystal development, and electric conductivity of the LNO thin films are measured by field-emission scanning electron microscope (FE-SEM), X-ray diffraction (XRD), and a four-point probe, respectively. Flash light sintering was accomplished in milliseconds. Through the comparison of thermal sintering and flash light-sintering results, it was confirmed that perovskite LNO thin films deposited by the CSD method can be fabricated by flash light sintering. We show that the flash light sintering method can solve several inherent issues of the conventional thermal sintering method. [ABSTRACT FROM AUTHOR]