1. Fabrication and thermo stability of the SnO2/Ag/SnO2 tri-layer transparent conductor deposited by magnetic sputtering
- Author
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Wang Wei, B.L. Zhu, Wencai Zhou, Chuanshen Wang, Linfei Liu, Wei Xiaojun, and Chongjie Wang
- Subjects
010302 applied physics ,Materials science ,Annealing (metallurgy) ,Process Chemistry and Technology ,Recrystallization (metallurgy) ,02 engineering and technology ,Conductivity ,021001 nanoscience & nanotechnology ,01 natural sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Sputtering ,Electrical resistivity and conductivity ,0103 physical sciences ,Materials Chemistry ,Ceramics and Composites ,Transmittance ,Thermal stability ,Composite material ,0210 nano-technology ,Sheet resistance - Abstract
Using the magnetic sputtering technique, the SnO2/Ag/SnO2 tri-layer transparent films were fabricated on float glasses successfully. Compared with the commercial FTO (F-doped SnO2) film, the SnO2/Ag/SnO2 tri-layer films have higher visible-light transmittance and better conductivity. The total thickness of the SnO2/Ag/SnO2 films is one third of the commercial FTO film leading to the high visible-light transmittance. The high carrier concentration of the SnO2/Ag/SnO2 films contributes to the tri-layer films’ low resistivity. In addition, to further improve the performance of the SnO2/Ag/SnO2 tri-layer films, samples were annealed under different temperatures. The results illustrate that the lowest sheet resistance (5.92 Ω/sq) and the highest visible-light transmittance (87.0%) were obtained after annealing at 200 °C. Furthermore, the thermal stability of the films could be enhanced by a multi-step annealing process due to the recrystallization effect.
- Published
- 2021
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