1. IGZO-TFT钝化层三元复合结构过孔刻蚀.
- Author
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田茂坤, 董晓楠, 黄中浩, 王骏, 王思江, 赵永亮, 闵泰烨, 袁剑峰, 孙耒来, 谌伟, 王恺, and 吴旭
- Subjects
PLASMA etching ,COMPOSITE structures ,PASSIVATION ,ETCHING ,DEFECTION ,SILICON nitride - Abstract
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- Published
- 2019
- Full Text
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