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The temporal evolution of parallel and perpendicular ion velocity distribution functions (ivdf ) in a pulsed, helicon-generated, expanding, argon plasma is presented. The ivdf’s temporal evolution during the pulse was determined with time resolved (1 ms resolution), laser induced fluorescence. The parallel ivdf measurements indicate that, in the expansion region of the plasma and for certain operational parameters, two ion populations exist: a population moving at supersonic speeds (1.1 Mach) resulting from acceleration in an electric double layer (EDL) and a slow moving population (0.7 Mach) generated by local ionization. After 100 ms, although present, the EDL is not fully developed and has not reached a steady-state. Measurements of the perpendicular ivdf indicate constant radial expansion, with ion speeds of ≈ 400 ms −1 , in the expansion region.

Amorphous fluorocarbon polymer films (a-C:F) have been grown by plasma enhanced chemical vapor deposition from a new precursor, namely perfluoro-octane (C8F18) vapor. The dielectric and insulating properties of the films have been assessed by means of capacitance–voltage and current–voltage characteristics, breakdown voltage measurements, scanning electron microscopy, and ellipsometric analyses. In the investigated frequency range, 120 Hz–1 MHz, the films have a low dielectric constant (≈2.4) and a low dielectric loss (⩽3×10−2). The electrical conduction mechanism is ohmic in the weak electric field regime, with a bulk resistivity of 4×1015 Ω cm, and a trap modulated space charge limited conduction in the strong electric field regime. For a film thickness between 1 and 12 μm, the dielectric strength varies with film thickness according to EB∼h−0.53. For a film thickness of 1 μm the film dielectric strength was 2.7 MV/cm while for 12 μm it decreased to 0.9 MV/cm. Measurements of the breakdown voltage in nitrogen gas in the low pressure regime between a-C:F coated cathode and copper anode showed an enhancement of the breakdown voltage by a factor of 2.5 with respect to the case of copper–copper electrodes.

The parallel ion flow in a high-density helicon source plasma expanding into a region of weaker magnetic field is measured as a function of neutral pressure, magnetic field strength, rf power and rf driving frequency. The dependence of the parallel ion flow and parallel ion temperature, measured by laser induced fluorescence, on the plasma density, electron temperature and floating potential, measured with an rf-compensated Langmuir probe, is also examined. At the end of the helicon plasma source, the ion velocity space distribution changes from a single subsonically drifting Maxwellian population to a supersonic ion beam (≈15 eV) plus a cold, subsonically drifting background ion population. At 38 cm into the expansion region beyond the end of the plasma source, the supersonic ion beam is not observed.

The method of obtaining amorphous fluorocarbon polymer (a-C:F) films by plasma enhanced chemical vapor deposition in a capacitively coupled, 13.56 MHz reactor, from a new monomer, namely perfluoro-octane (C8F18) vapor, is presented. For monomer pressure ranging from 0.2 to 1 Torr and input power density from 0.15 to 0.85 W/cm3, the maximum deposition rate reached 300 nm/min, while 10% monomer dilution with argon led to a deposition rate of 200 nm/min. The film surface and bulk morphologies, chemical and structural compositions were investigated using scanning electron microscopy, x-ray photoelectron spectroscopy, and Fourier transform infrared spectroscopy. It was revealed that the films have a dense and compact structure. The fluorine to carbon ratio (F/C) of the films was between 1.57 and 1.75, and the degree of cross-linking was between 55% and 58%. The relative amount of perfluoroalkyl (CF2) groups in the films was 29%. The FTIR spectra showed absorption bands corresponding to the different vibrationa...

The titanium vapor plasma generated by a thermionic vacuum arc was spectroscopically investigated. The electronic temperature was obtained using the method of spectral lines intensity ratios. Three sets of spectral lines have been used, each set having the same energetic lower level namely: fundamental, 170.132 cm−1 and 386.874 cm−1 respectively. For an arc current Iarc=1 A and an arc voltage Uarc=670 V, an average electronic temperature of plasma Te=(2860±587) K was obtained. Moreover, spectroscopic investigations of the interelectrodic plasma show that the discharge is totally sustained by evaporated anode material.

A high-uniformity inductively coupled plasma source is presented. The plasma uniformity is improved with a magnetic multicusp structure that surrounds the plasma chamber. A picture showing the alternating bright and dark plasma regions along the perimeter of the plasma chamber-an effect of the magnetic confinement-is presented as well.

Observations in steady-state plasmas confirm predictions that formation of a current-free double layer in a plasma expanding into a chamber of larger diameter is accompanied by an increase in ionization upstream of the double layer. The upstream plasma density increases sharply at the same driving frequency at which a double layer appears. For driving frequencies at which no double layer appears, large electrostatic instabilities are observed. Time-resolved measurements in pulsed discharges indicate that the double layer initially forms for all driving frequencies. However, for particularly strong double layers, instabilities appear early in the discharge and the double layer collapses.

The diagnostic technique of laser induced fluorescence (LIF), generalized to the case of oblique laser injection angle relative to the local magnetic field direction, is employed for studies of the ion velocity distribution function (IVDF) in the magnetic expansion region of a helicon plasma source. One-dimensional LIF measurements reveal key characteristics of the acceleration mechanism responsible for creation of an ion beam in the expansion regions: a bimodal IVDF comprising a slowly drifting (~150?m?s?1) ion population and a fast ion beam (~10.7?km?s?1). Two-dimensional LIF, LIF tomography, provides additional insight regarding the origins of the two ion populations: the nearly isotropic slow population is a locally created background population whereas the distorted velocity distribution of the fast population is consistent with an origin upstream of the measurement location.

Measurements of the three-dimensional ion flow field and the ion temperature in a cross section of a cylindrical, argon, helicon plasma are presented. When these measurements are combined with radially resolved measurements of the plasma density, electron temperature, neutral density, and neutral temperature, the radial profiles of the ion viscosity and ion-neutral momentum transfer rate can be calculated. The ion viscosity and ion-neutral momentum transfer rate profiles are important input parameters for theoretical models of azimuthal flows arising from the nonlinear interaction of drift waves in helicon sources. The experimentally determined magnitudes and radial profiles reported in this work are significantly different than those used in recent theoretical studies. Measurements of the radial flow of argon neutrals and helium neutrals are also presented for a helicon plasma.

A low-frequency, transverse electromagnetic wave is observed in a magnetized helicon plasma with 1⪢β>νe∕Ωe. The wave is localized to the vicinity of the largest plasma density gradient and appears only at a low neutral pressure. Based on the scaling of the wave frequency and amplitude with magnetic field strength, the wave is identified as the resistive drift Alfven wave.