1. Understanding and improving carbon nanotube-electrode contact in bottom-contacted nanotube gas sensors
- Author
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Cosmin Roman, Seoho Jung, Christofer Hierold, Roland Hauert, and Miroslav Haluska
- Subjects
Nanotube ,Materials science ,Fabrication ,02 engineering and technology ,Carbon nanotube ,010402 general chemistry ,01 natural sciences ,law.invention ,Carbon nanotube field-effect transistors ,Condensed Matter::Materials Science ,law ,Materials Chemistry ,Dry transfer ,Electrical and Electronic Engineering ,Instrumentation ,Carbon nanotube-metal contact ,Nanomaterials ,Contact resistance ,Self-heating ,business.industry ,Transistor ,Metals and Alloys ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect ,Electrical contacts ,0104 chemical sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Electrode ,Optoelectronics ,0210 nano-technology ,business - Abstract
Suspended carbon nanotube field-effect transistors fabricated with a dry transfer technique demonstrate strong promise as ultra-low-power, hysteresis-free gas sensors. However, the difficulty of establishing a good electrical contact between a nanotube and the electrode surface often limits the yield of low-resistance devices that can operate as low-power gas sensors. In this work, the contact resistance at the nanotube-metal interface and the distribution thereof are reduced significantly by removing the top layer of electrode surface with Ar-ion etching directly before nanotube placement. Combined with post-transfer annealing, this pre-transfer electrode surface cleaning reduces the median ON-resistance of transistors by an order of magnitude--from 1.56 MOhm to 143 kOhm--and the interquartile range by more than two orders of magnitude--from 9.38 MOhm to 59 kOhm. The ability to consistently improve nanotube-metal contact demonstrated in this work is a significant advance in the fabrication of ultraclean nanotube transistors and carbon nanotube gas sensors., Sensors and Actuators B: Chemical, 331
- Published
- 2021