1. Fast growth of conductive amorphous carbon films by HFCVD with filament temperature control.
- Author
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Zhai, Zihao, Shen, Honglie, and Chen, Jieyi
- Subjects
- *
CARBON films , *CRYSTAL growth , *CHEMICAL vapor deposition , *QUARTZ , *CHEMICAL synthesis , *TEMPERATURE control - Abstract
Amorphous carbon (a-C) films were synthesized on quartz substrates through a hot-filament chemical vapor deposition (HFCVD) method. Effect of filament temperature on the thickness, structural, morphological and electrical properties of a-C films was investigated. Both the crystalline quality and sp 2 content of a-C films increased by raising the filament temperature from 1800 °C to 2000 °C. Sharp increase of the surface roughness was observed as the filament temperature increased from 2000 °C to 2100 °C. The a-C films deposited at the filament temperature of 2000 °C with a high growth rate of 35 nm/min exhibited the optimal quality with a small roughness of 0.546 nm and a low resistivity of 1.67 × 10 −2 Ω·cm. These results indicated that HFCVD is a good method to prepare conductive a-C films rapidly and effectively. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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