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Research and development of carbon materials and advanced composites require a health monitoring of carbon fibers. A Villari effect- based method was developed for the measurement of the mechanical strain inside the carbon fiber. A microsensor was built up directly on an 8-μm-thick carbon fiber. Deposition technologies were physical vapor deposition (PVD) and chemical vapor deposition (CVD). For patterning a coaxial spiral coil, a nanolathe implemented in a focused ion beam (FIB) system using the beam as a cutting tool in a turning process was applied. This paper describes the design, fabrication, experimental setup, and the first measurement results of the magnetoelastic microsensor. [ABSTRACT FROM AUTHOR]

An active magnetic levitation system based on repulsive magnetic forces was developed as a guide for a linear hybrid microstep motor. With this levitation system, the vertical force, which is typically an order of magnitude greater than the driving force, can be compensated. A capacitive measurement system provides measurement data to maintaining a constant air gap. This paper presents the design, fabrication, and first measurement results of the magnetic guide and the air gap measurement sensor. [ABSTRACT FROM AUTHOR]

A highly sensitive micro strain gauge may be created by building up a thin-film micro transformer with one leg of its flux guide made out of magnetoelastic material. Locating the magnetoelastic leg at the bottom of the micro transformer structure directly on top of the wafer lends itself for integration in a cantilever beam subjected to bending. On the other hand, putting the magnetoelastic layer on top and placing it on an external tension bar instead of integrating it into the sensor allows for strain measurement without exposing the strain gauge itself to stain. By choosing a modular design, both types of micro transformers may be fabricated in the same wafer process. This paper describes design, fabrication, and performance of such a modular system. [ABSTRACT FROM AUTHOR]

Presents information on a study which shows a proposal for a wide trackwidth thermal asperity test head with a dual stripe sensor on a picoslider. Experimental procedure of the study; Results of the study; Conclusions.