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Excess heat capacity in a bolometric detector has the consequence of increasing or leading to multiple device time constants.  The Mo/Au bilayer transition edge sensor (TES) bolometric detectors initially fabricated for the high resolution mid-infrared spectrometer (HIRMES) exhibited two response thermalization scales, one of which is a few times longer than estimates based upon the properties of the bulk materials employed in the design. The relative contribution of this settling time to the overall time response of the detectors is roughly proportional to the pixel area, which ranges between ∼0.3 and 2.6 mm2.  Use of laser ablation to remove sections of the silicon membranes comprising the pixels results in a detector response with a smaller contribution from the secondary time constant.  Additional information about the nature of this excess heat capacity is gleaned from glancing incidence X-ray diffraction, which reveals the presence of molybdenum silicides near the silicon surface which is a consequence of the bi-layer deposition.  Quantitative analysis of the concentration of excess molybdenum, estimated with secondary ion mass spectroscopy, is commensurate to the additional heat capacity needed to explain the anomalous time response of the detectors. [ABSTRACT FROM AUTHOR]

Transition edge sensors (TESs) are used extensively in millimeter-wave and submillimeter-wave astronomy. The next technological push is to reduce the noise equivalent powers from 10-17 to 10-20 W Hz-1/2 in order to take full advantage of the exceptionally low backgrounds associated with cooled-aperture space telescopes. We describe a lab-on-a-chip (LoC) for measuring the small-signal and noise properties of ultralow-noise microstrip-coupled TESs. The LoC comprises two suspended SiNx membranes, one of which supports a single-mode, variable-temperature blackbody source, and the other a microstrip-coupled TES. The two devices are connected by a superconducting microstrip transmission line. The temperature of the source is determined by Johnson noise thermometry using superconducting quantum interference device readout. In this paper, we describe the theory, layout, operation, and calibration of the experimental system and report on two prototype devices. The LoC concept has many advantages, and already we have been able to assess the optical efficiencies of our TESs. We have started to gain an appreciation of the losses associated with 100–300 GHz microminiature superconducting microstrip transmission lines at low temperatures. The next phase of our work is to apply the technique to ultralow-noise detectors, to study fluctuation phenomena in multimode devices, and to investigate the behavior of more complicated integrated circuits. [ABSTRACT FROM AUTHOR]

The fabrication of low-loss wide-bandwidth superconducting vacuum-gap crossovers for high performance millimeter wave applications is described. In order to reduce ohmic and parasitic losses at millimeter wavelengths a vacuum gap is preferred relative to dielectric spacer. Here, vacuum-gap crossovers were realized by using a sacrificial polymer layer followed by niobium sputter deposition optimized for coating coverage over an underlying niobium signal layer. Both coplanar waveguide and microstrip crossover topologies have been explored in detail. The resulting fabrication process is compatible with a bulk micromachining process for realizing waveguide coupled detectors, which includes sacrificial wax bonding, and wafer backside deep reactive ion etching for creation of leg isolated silicon membrane structures. Release of the vacuum-gap structures along with the wax bonded wafer after deep reactive ion etching is implemented in the same process step used to complete the detector fabrication. [ABSTRACT FROM AUTHOR]