1. Aqueous-Base-Developable Benzocyclobutene (BCB)-Based Material Curable in Air.
- Author
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Ying-Hung So, Stark, Edmund J., Yongfu Li, Kisting, Scott, Achen, Albert, Baranek, Kayla, Scheck, Daniel, Hetzner, Jack, Folkenroth, Jason J., Topper, Michael, and Baumgartner, T.
- Subjects
AQUEOUS polymeric coatings ,ELECTRONICS ,DIELECTRIC devices ,ANTIOXIDANTS ,MECHANICAL properties of metals ,MICROELECTRONICS - Abstract
A positive-tone and aqueous-base-developable benzocyclobutene (BCB)-based dielectric material curable in air is described in this paper. The prepolymer is made from divinylsiioxane bisbenzocyclobutene (DVS-bisBCB) and BCB-acrylic acid. The formulation contains antioxidants that allow the prepolymer to cure in air and a diazonaphthaquinone to make it photosensitive. Patterned films have high resolution, and via openings are scum-free without a descum operation. Whether cured in nitrogen or in air, the prepolymer produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as packaging applications and as a planarization or insulation layer in display applications. [ABSTRACT FROM AUTHOR]
- Published
- 2006
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