1. Polarization-independent two-dimensional diffraction metal-dielectric grating.
- Author
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Chen, Junming, Zhang, Yibing, Wang, Yonglu, Kong, Fanyu, Jin, Yunxia, Chen, Peng, Xu, Jiao, Sun, Shuhui, and Shao, Jianda
- Subjects
METALS ,DIELECTRIC function ,DIFFRACTION gratings ,LASER beams ,FABRICATION (Manufacturing) - Abstract
Two-dimensional (2D) diffraction gratings have been developed rapidly in several growing areas of research, but most of them were polarization sensitive with limitations toward practical applications. We report a 2D diffraction grating solution for achieving polarization-independent high efficiency property. The grating was designed and fabricated based on thin-film coatings, orthogonally lithography, and ion-beam etching technology. The measured average (−1, 0) order reflective diffraction efficiency (DE) is 74.8% (p-polarization) and 68.2% (s-polarization) from 770 nm to 790 nm and the lowest difference of DE between two polarizations is 0.593% at 785.5 nm incident wavelength of our sample. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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