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Start Over Author "Larsen, K. Kyllesbech" Topic diffusion
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1. Heavy doping effects in the diffusion of group IV and V impurities in silicon.

Author

Larsen, A. Nylandsted, Larsen, K. Kyllesbech, Andersen, P. E., and Svensson, B. G.

Subjects
*DIFFUSION, *SILICON
Abstract

Presents a study which investigated the diffusion of germanium, tin, arsenic and antimony in silicon at high donor concentrations provided by phosphorous doping. Background on diffusion in silicon; Experimental details; Experimental results and discussion.

Published
1993
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