Search

In this letter, a novel edge termination named deep junction termination for silicon superjunction (SJ) MOSFETs is proposed, simulated, and experimentally demonstrated for the first time. By utilizing a typical implantation-and-epitaxy process to form P- and N-pillars for SJ, it is possible to form deep junctions as the device termination with a large radius of curvature and lateral and vertical doping gradation. The 2-D simulation shows that more than 700-V blocking voltage (BV) can be achieved by a 57- \mu \textm drift layer with this novel termination, and experimentally BV as high as 660 V is demonstrated by the fabricated device. [ABSTRACT FROM AUTHOR]

A comprehensive study on the dielectric modulated (DM) drift region for power devices is presented in this paper. The performance of this drift region structure is theoretically analyzed and compared with other two structures: conventional and superjunction. In this paper, a study is focused on switching performance. The C – V relationships during switching are analytically derived, and the depletion widths predicted by the proposed analytical model agree well with simulation in a wide reverse bias region. The switching energy loss is evaluated based on the analytical model and its accuracy is verified by 2-D simulations. An effective depletion charge QD is defined as E\mathrm {loss} / breakdown voltage (BV), from which a figure of merit (FOM) of R\mathrm{\scriptscriptstyle ON,\mathrm {sp}}{}^\ast QD is proposed to compare the performances of these different drift region structures, considering both the conduction and switching losses. The discussions in part I on Si and silicon carbide device structures are extended in part II to include FOMs. It is found that the DM drift region structures show better R\mathrm{\scriptscriptstyle ON,\mathrm {sp}} -BV tradeoffs compared with the conventional structures, but slighter inferior FOMs. However, DM structures are still attractive for applications, where switching loss is less critical than the conduction loss, such as low frequency or soft switching. [ABSTRACT FROM PUBLISHER]

A comprehensive study of dielectric modulated (DM) drift regions for power devices is presented in this paper. The performance of this structure is theoretically analyzed and compared with both conventional and superjunction (SJ) structures. In this paper, an analytical model for DM drift regions with cylindrical cells is proposed and compared with linear cells. An optimal tradeoff between breakdown voltage (BV) and specific ON-resistance ( R\scriptscriptstyle ON,sp) is obtained by a methodology developed in this paper. 3-D simulations of DM structures with hexagonal cells approximated by cylindrical cells are conducted to verify the analytical model. Optimal BV– R\scriptscriptstyle ON,sp tradeoffs for devices with conventional and SJ drift regions are also obtained through the same methodology and verified by 3-D simulations. Static characteristics of these three different drift region structures in both Si and SiC power devices are compared. [ABSTRACT FROM AUTHOR]