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This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 μV/ √ Hz, and a resolution of 0.23 pN/ √ Hz. In comparison with a conventional drive scheme, the blue- sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications.

Magnetometers are ubiquitous in applications covering many aspects of modern life, such as navigation, smart devices, biomedical systems, geological surveying and aerospace. This work reports a resonant Lorentz-force magnetometer featuring structural topology, in which cavity slots are incorporated in the device structure to improve the thermoelastic dissipation. Such a device is capable of sensing a small Lorentz-force and can be used as a sensitive magnetic field sensor. The most prominent property of this subject is implementing sensing tasks under a large bias magnetic field. The proposed magnetometer achieves a quality factor of 43000 in a vacuum of 4 mPa, a Lorentz-force sensitivity of 0.2 Hz/nN, and a magnetic field change sensitivity of 3375 Hz/T. The topology of the double-ended tuning fork (DETF) using cavity slots in the tine beams resulted in a 5.9-fold enhancement of the Q-factor compared to a common DETF resonator with the same geometry. Experimental characterization of the proposed magnetometer confirms its feasibility and functionality. Experiments about an application scenario with a large pre-existing bias magnetic field were carried out. The prototype device demonstrated a magnetic field change sensitivity of 2585 Hz/T and a noise-limited resolution of 210 nT/√ Hz, under a bias magnetic field of 0.13 T. [2021-0162]

In this paper, the air buoyancy effect on Micro-Electro-MechanicalSystem (MEMS)-based gravity sensors for high-resolution gravity measurements is investigated. The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber; thus significantly simplifying the design, implementation and maintenance, and reducing the cost of the instrument. It is experimentally observed that the measured acceleration signal shows a clear correlation with the air buoyancy, and consequently the air pressure. A detailed theoretical model of the air buoyant force acting on the MEMS gravity sensor is proposed, giving a gravity-air pressure coefficient of 501.5 $\mu$ Gal/hPa for the silicon springmass system. After removing the error introduced by the air buoyant force, the MEMS gravity sensor exhibits an ultra-low self-noise floor of 1 $\mu {\mathrm {Gal}}/\sqrt{\rm Hz}$ @1 Hz, as well as an excellent stability, with an Allan deviation of 3 $\mu$ Gal (40 s integration time). The sensor is capable of measuring the Earth tides in a 16-day span. This discovery identified one major error source in high-resolution MEMS gravity sensors operating in atmosphere, which could potentially be useful for the development of future MEMS-based gravimeters.

The reduction of temperature effect is vitally important for high precision sensors. This paper introduces the theoretical analysis and experimental verification of an in-situ compensation method on the temperature coefficient of the scale factor for a single-axis electromagnetic force-balance feedback MEMS accelerometer. A micro thermistor, fabricated together with the MEMS accelerometer, is integrated to in-situ sense the temperature variation of the accelerometer. The thermistor is connected to the voltage-to-current resistance in series, which compensates the variation of the scale factor of the accelerometer that is influenced by temperature variation. The experimental results reveal that the temperature coefficient of the scale factor of the compensated accelerometer is within 6 ppm/°C for the temperature range from 25°C to 50°C, which is reduced by 68 times compared with the uncompensated accelerometer. Benefiting from the compatible fabrication process and the in-situ compensation, the proposed method is promising to be low-cost and high-efficiency.

In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS thermometer, based on parametric modulation, is proposed. By periodically modulating the effective stiffness of a standard clamped-clamped beam (C-C beam), which is used as a proof-of-concept resonant MEMS thermometer, it is possible to create a virtual energy coupling between two fundamental modes of vibration. Through this energy transfer link, one particular mode (ideally high sensitivity) can be transferred to the vicinity of another mode (ideally low noise), thus creating an operating region where both increased sensitivity and low noise can be achieved. As a starting point, a sensitivity enhancement of up to 126% can be achieved in this particular study, while not deteriorating the readout noise floor. A noise floor of 19.7 $\mu $ K/Hz 1/2 has been achieved. Potentially, this approach could be extended to other structures, or be used to decrease sensitivity to temperature fluctuations as well. [2021-0050]

Mounting requirements of a rotating accelerometer gravity gradiometer (RAGG) beyond the art of manufacture, the RAGG is susceptible to the motion of itself. Motion error is a main source of error in airborne gravity gradiometry data. This study presented a posterror compensation method, which consists of postmotion error compensation and post-self-gradient compensation. The motion error and self-gradients are compensated before that the combined output of the four accelerometers is quadrature amplitude demodulated. The motion error compensation is based on the RAGG analytical model; motion response of the RAGG (namely, motion error) is related well to the motion of the RAGG, independent of the gravitational gradient response; recording the motion status of the RAGG, with least squares regression method and the RAGG analytical model, the motion response of the RAGG are separated and removed. RAGG numerical simulation experiment results show that the postmotion error compensation method is feasible, and its limit accuracy could reach 0.5 E/ $\surd $ Hz.

Nano- $g$ accelerometers are widely used in space exploration and measurement of the earth’s gravitational field. It is essential to precisely evaluate error effects at high orders such as cross-coupling for applications in a dynamic environment. Nevertheless, it remains challenging to meet the precision requirements using conventional calibration measures. In this article, we propose a method to separate the cross-coupling coefficients of a linear single-axis accelerometer by mounting it on a steadily rotating rate table that is tilted at a fixed deviation angle with respect to the horizontal plane. The gravity component is periodically modulated along the input axis per revolution. Simultaneously, a series of centripetal acceleration is applied along the cross axis in sequence while adjusting the rotation frequency of the rate table by steps. Thus, the cross-coupling coefficient can be separated by its dependence both on the modulated gravity acceleration and the centripetal acceleration. In comparison to the static multipoint angular rotation test on a tilted dividing head, the proposed dynamic modulation method demonstrates improved robustness against corruption from bias drift, with an improved uncertainty. This method to separate the cross-coupling coefficient is suitable for testing high-resolution accelerometers, without requiring high bias stability or sensitive response sustaining at ultralow frequency.

High-precision microelectromechanical inertial sensors based on spring-mass structures are of great interests for a wide range of applications, including inertial navigation, disaster warning and resource exploration. Lowering the resonant frequency is essential to further improve the sensitivity of the sensors. However, conventional approaches are facing insurmountable difficulties from size reduction to machining precision. This paper proposed a novel quasi-zero-stiffness mechanism that is compatible with MEMS technologies together with a micromaching approach for adjusting the stiffness precisely. By improving the compliance of a typical spring with a negative-stiffness compensation mechanism induced by axial force, the resonant frequency of the micro spring-mass structure is lowered to 0.7 Hz, which is at least 3 times lower than current state-of-the-art micro structures. Based on this ultra-sensitive micro structure base on the quasi-zero-stiffness mechanism, the micro inertial sensor, with a chip size of a postage stamp, has shown a low self-noise of 0.6 nrad/ $\surd $ Hz at 0.04 Hz and a high long-term stability that are comparable to traditional pendulum inertial sensors. It is the first micro device, to our knowledge, that can successfully measure the tidal tilt signal. [2020-0048]

This paper describes a hybrid mass sensing system comprising a QCM (quartz crystal microbalance) mass sensor operating under atmospheric pressure and a 3-DOF mode localized coupled resonator operating in vacuum. Nanoparticles as consecutive mass perturbations are added onto the QCM, the output signals with respect to the amount of mass change are then being manipulated to generate electrostatic forces. Subsequently, the electrostatic forces act on the 3-DOF mode localized coupled resonator as external stiffness perturbations. The output metrics of the hybrid system were defined as: the resonant frequency shifts, vibration amplitude changes, and the changes in resonance amplitude ratio. Measured data was analyzed for these metrics and compared. This work demonstrated that the proposed hybrid mass sensing system attained a ${2.5\times }10^{\text 6}{N}{(\text{m}\bullet \text{kg})}^{-1}$ mass to stiffness transduction factor, and has the potential to be employed as a direct liquid contact biochemical transducer.

Capacitive transducers are widely used in fundamental physics experiments, seismology, Earth or planetary observations, and space scientific and technical applications because of their high precision, simple structure, and compatibility with various measurements. However, in real applications, there is a trade-off between their resolution and dynamic range. Therefore, this paper is aimed at enlarging the dynamic range while ensuring high resolution. In this paper, a noise analysis of a capacitive transducer is presented, which shows that the amplitude noise of the carrier wave is the main limiting factor. Hence, a new method of generating a carrier wave with lower-amplitude noise is proposed in the paper. Based on the experimental verification, it is found that the carrier wave produced through the new method performed significantly better than the typical digital carrier wave when they were compared in the same sensing circuit. With the carrier wave produced through the new method, the dynamic range of the capacitive transducer can reach 120.7 dB, which is 18.3 dB greater than for the typical direct digital synthesis (DDS) method. In addition, the resolution of the carrier wave is mainly limited by the voltage reference components.

High-precision seismic sensors are key components in geophysical applications. Traditional seismic sensors apply levelling systems to avoid overload by the gravity projection, introducing additional volume, weight and cost. In this paper, we design, fabricate and experimentally demonstrate a levelling-free single-axis in-plane seismic sensor based on MEMS technology. Three kinds of capacitive sensors are integrated into one chip. Two encoder-like area-varying capacitive displacement sensors work alternatively to avoid the inflection points, enabling the seismic sensor to work linearly in arbitrary attitudes with a high sensitivity and an angle sensor selects the working array from the two arrays and measures the angle between the sensitive direction and gravity direction at the same time. In order to calibrate the scale factor, a gap-varying capacitive displacement sensor is integrated to measure the spacing. By the combination of these capacitive sensors, the micromachined seismic sensor is able to work in arbitrary attitudes with a resolution of better than 50 ng/√Hz at 1 atmosphere. Assembling three seismic sensors along axes orthogonal to each other, a three-axis seismic measurement system can be constructed. This system has successfully detected a MS7.0 earthquake at 2017-08-08 (UTC time), which happened in Sichuan Province (1000 km away), and another MS6.6 earthquake happened about 10 h later in Xinjiang Province (2700 km away). Being low cost and low power, this nano-g MEMS seismic sensor provides an alternative solution for geophysical applications.

In this paper, we present a suppression method for the thermal drift of an ultra-stable laser interferometer. The detailed analysis on the Michelson interferometer indicates that the change in optical path length induced by temperature variation can be effectively reduced by choosing proper thickness and/or incident angle of a compensator. Taking the optical bench of the Laser Interferometer Space Antenna Pathfinder as an example, we analyze the optical bench model with a compensator and show that the temperature coefficient of this laser interferometer can be reduced down to 1 pm/K with an incident angle of 0.267828 rad. The method presented in this paper can be used in the design of ultra-stable laser interferometers, especially for space-based gravitational waves detection.

TianQin-1 is a mission in the TianQin project, which uses a single satellite to demonstrate the maturity of the key technology for the space-based gravitational wave detection. The spaceborne laser in the TianQin-1 mission consists of a self-developed DBR one and a commercial RIO one. The DBR laser is also developed as a pumping source for the main NPRO laser in the final solution of TianQin. The two lasers were mutual backups and both passed the environment performance verification. The on ground results showed that the self-developed DBR laser could provide a stable output of 18 mW with a drift of 0.6 mW/h. Meanwhile, the internal temperature was controlled at the mK level. The results of in-orbit experiments show that the DBR laser works well as a direct source of the laser interferometer. The overall displacement resolution and the noise floor of the interferometer was approximately 25 pm and 30 pm/√Hz at 0.1 Hz, respectively, better than the goals of the TianQin-1 mission.

Capacitive MEMS accelerometers with area‐variable periodic‐electrode displacementtransducers found wide applications in disaster monitoring, resource exploration and inertialnavigation. The bonding‐induced warpage, due to the difference in the coefficients of thermalexpansion of the bonded slices, has a negative influence on the precise control of the interelectrodespacing that is essential to the sensitivity of accelerometers. In this work, we propose the theory,simulation and experiment of a method that can alleviate both the stress and the warpage byapplying different bonding temperature on the bonded slices. A quasi‐zero warpage is achievedexperimentally, proving the feasibility of the method. As a benefit of the flat surface, the spacing ofthe capacitive displacement transducer can be precisely controlled, improving the self‐noise of theaccelerometer to 6 ng/&radic, Hz @0.07 Hz, which is about two times lower than that of the accelerometerusing a uniform‐temperature bonding process.

Precise measurement of variations in the local gravitational acceleration is valuable for natural hazard forecasting, prospecting, and geophysical studies. Common issues of the present gravimetry technologies include their high cost, high mass, and large volume, which can potentially be solved by micro-electromechanical-system (MEMS) technology. However, the reported MEMS gravimeter does not have a high sensitivity and a large dynamic range comparable with those of the present commercial gravimeters, lowering its practicability and ruling out worldwide deployment. In this paper, we introduce a more practical MEMS gravimeter that has a higher sensitivity of 8 μGal/√Hz and a larger dynamic range of 8000 mGal by using an advanced suspension design and a customized optical displacement transducer. The proposed MEMS gravimeter has performed the co-site earth tides measurement with a commercial superconducting gravimeter GWR iGrav with the results showing a correlation coefficient of 0.91., Sensors: A MEMS gravimeter combines high precision with portability Researchers in China have developed a small, portable gravimeter based on micro-electromechanical-system (MEMS) technology with a sensitivity and dynamic range comparable with larger, commercially available gravimeters. The new device was created by a team led by Liangcheng Tu at Huazhong University of Science and Technology. The MEMS mechanism consists of a spring-mass system designed around a combination of curved and folded beams. Together, these ensure that the system is stiff under low loads but flexible at loads around 1 g. An optical component measures the displacement of the proof mass to measure gravitational acceleration. The team tested their design alongside a commercial gravimeter and found a 90% correlation in the measurements of Earth tides, demonstrating its utility for applications from oil and gas exploration to hazard detection.

This paper presents a micromachined micro-g capacitive accelerometer with a silicon-based spring-mass sensing element. The displacement changes of the proof mass are sensed by an area-variation-based capacitive displacement transducer that is formed by the matching electrodes on both the movable proof mass die and the glass cover plate through the flip-chip packaging. In order to implement a high-performance accelerometer, several technologies are applied: the through-silicon-wafer-etching process is used to increase the weight of proof mass for lower thermal noise, connection beams are used to reduce the cross-sensitivity, and the periodic array area-variation capacitive displacement transducer is applied to increase the displacement-to-capacitance gain. The accelerometer prototype is fabricated and characterized, demonstrating a scale factor of 510 mV/g, a noise floor of 2 &micro, g/Hz1/2 at 100 Hz, and a bias instability of 4 &micro, g at an averaging time of 1 s. Experimental results suggest that the proposed MEMS capacitive accelerometer is promising to be used for inertial navigation, structural health monitoring, and tilt measurement applications.

Capacitive sensing is a key technique to measure the test mass movement with a high resolution for space-borne gravitational wave detectors, such as Laser Interferometer Space Antenna (LISA) and TianQin. The capacitance resolution requirement of TianQin is higher than that of LISA, as the arm length of TianQin is about 15 times shorter. In this paper, the transfer function and capacitance measurement noise of the circuit are modeled and analyzed. Figure-of-merits, including the product of the inductance L and the quality factor Q of the transformer, are proposed to optimize the transformer and the capacitance measurement resolution of the circuit. The LQ product improvement and the resonant frequency augmentation are the key factors to enhance the capacitance measurement resolution. We fabricated a transformer with a high LQ product over a wide frequency band. The evaluation showed that the transformer can generate a capacitance resolution of 0.11 aF/Hz1/2 at a resonant frequency of 200 kHz, and the amplitude of the injection wave would be 0.6 V. This result supports the potential application of the proposed transformer in space-borne gravitational wave detection and demonstrates that it could relieve the stringent requirements for other parameters in the TianQin mission.

Tilt sensors have been widely used in many applications, such as instrumentation leveling, oil drilling and structural health monitoring. With the rapid development of the micro-electromechanical system (MEMS) technology, MEMS accelerometer-based high-performance tilt sensors are capable of replacing conventional tilt sensors in most of application fields. High-sensitivity MEMS resonant accelerometers (MRAs) are fully qualified for tilt sensing. However, MRA chips have to be vacuum packaged and require complex circuits; therefore, they are difficult to be miniaturized and commercialized. In this case, this paper introduces a commercial-oriented capacitive MEMS accelerometer for tilt sensing with both high-resolution and compact size. The proposed MEMS sensor utilizes simplified fabrication processes, the area-change-based capacitive displacement transducer and the capacitance-to-voltage conversion application specific integrated circuit (ASIC) for low-cost, high-sensitivity, low power consumption and miniaturization. The developed MEMS sensor has a package dimension of 14 mm × 14 mm × 3.6 mm with a single +5 V power supply and analog voltage output. Several evaluation experiments have been conducted with the results showing that the developed MEMS tilt sensor has a full measurement range of ±180°, a linear measurement range of ±30° with a nonlinearity of ±2.8%, a sensitivity of 33.6 mV/°, a noise floor of 2 × 10−4°/√Hz, a bandwidth of 100 Hz and an angle resolution of 7 × 10−4° with an integral time of 0.5 s. Compared with other commercial MEMS tilt sensors, the proposed sensor has a better resolution, a lower noise floor, a larger bandwidth, a lower power consumption and a smaller package. The simplified fabrication process and high performance suggest the developed MEMS tilt sensor is promising to be competitive in the market.

Diamagnetism as a fundamental physical phenomenon is commonly existed in many materials, such as water and even human body. Since the Nobel Prize laureate Prof. Geim successfully demonstrated the flying frog in 1997, diamagnetic levitation has attracted significant research interests due to the advantages of simple structure, stable and passive levitation without power consumption. There are several applications based on diamagnetic levitation, including container-less crystal growth, weightless fluid dynamics, low friction bearings, magnet rotors, energy harvesters and also inertial sensors. However, the developed diamagnetic levitation based inertial sensors cannot meet the low-frequency response and high sensitivity requirements of geophysical applications. This paper introduces a prototype of a diamagnetic levitation based inertial sensor which includes the diamagnetic levitation system and the optical displacement transducer. The proof mass is a floating magnet which is lifted by a fixed magnet above and sandwiched by two pyrolytic graphite sheets for stable levitation. A high precision optical displacement transducer has been developed with a noise floor of 2 nm/√Hz@0.5 Hz and 0.1 nm/√Hz@10 Hz at atmosphere and room temperature. The fundamental frequency of the levitation system was measured as 0.65 Hz, giving an acceleration noise floor of 20 ng/√Hz@0.5 Hz (3.4 ng/√Hz@0.5 Hz in theory). Benefitting on the excellent sensitivity and low-frequency responses, earth tremor peaks at 0.2∼0.3 Hz and 2∼3 Hz have been observed using this inertial sensor. The proposed inertial sensor is promising to be used for high-sensitivity vibration monitoring, seismic imaging and other geophysical applications.

Area-changed capacitive displacement transducers have been widely applied in micro-electro-mechanical-system (MEMS) sensors such as sandwich-type MEMS accelerometers to detect in-plane displacement with a high sensitivity. The cross-axis disturbance could result in out-of-plane displacement of the proof mass, which brings a gap variation of sensing capacitor electrodes and lead to an undesirable variation of the accelerometer’s scale factor. In order to solve this problem, this paper presents a novel method to improve out-of-plane robustness of an Area-changed capacitive displacement transducer in a MEMS accelerometer. An on-chip capacitor, sensitive to the out-of-plane displacement of proof mass, was integrated as the feedback capacitor of the charge amplifier. Thus, the influence of the out-of-plane displacement on the scale factor caused by cross-axis disturbance is compensated. The method was verified by theoretical calculation, simulation and experiments. The results indicated that the cross-sensitivity of the MEMS accelerometer with an on-chip feedback capacitor was less than 1/3 of that with off-chip feedback capacitor when acceleration was applied on the out-of-plane direction. Besides, the noise floor of the accelerometer maintained at 60 ng/√Hz regardless of the on-chip or off-chip feedback capacitors.

Flexible micro-supercapacitors (MSCs) are promising candidates as miniaturized power sources and energy storage components for next generation wearable electronic devices. Herein, we report a low-temperature-operated ( ~ 80∘C) direct fabrication method for the realization of flexible MSCs. To demonstrate the capability of the fabrication method, a flexible MSC based on zinc oxide (ZnO) nanorod/titanium (Ti)/titanium nitride (TiN) core-shell nanostructures and metallic interdigits on a polyethylene terephthalate (PET) substrate was fabricated, with no additional transfer procedure required. The as-produced MSC exhibits increased power (432 W kg−1) and energy (0.24 Wh kg−1) densities, when compared to those of ZnO nanorod based or ZnO seed layer/Ti/TiN based devices. The capacitance retention is over 98 % after 5000 cycles, showing an excellent stability. The flexibility of the MSC is tested by bending the device from 0∘ to 180∘, demonstrating nearly identical electrochemical properties for all bending angles. With such a low temperature environment, the proposed fabrication strategy can be applied to other material networks to further improve the performance of MSCs. This method potentially allows for mass production due to its low fabrication complexity, paving the way for the direction fabrication of on-chip MSCs for flexible and wearable devices.

Photosensitive polyimide (PSPI) based insulating layer fabrication for microelectromechanical systems (MEMS) application has been systematically investigated in this work. The PSPI was spin coated on a silicon substrate as an insulating layer between two metal lines. In consideration of thermal properties, a low temperature hard bake process was carefully optimized. Finally, the polyimide insulating layer was hardened by exposure to air at 80°C for 120 min + 150°C for 60 min + 180°C for 60 min + 250°C for 60 min + 350°C for 60 min in a dry furnace. Using this optimized hardening process, the outgassing effect in post-fabrication heat treatment can be completely eliminated, which presented an excellent thermal resistance in MEMS fabrications. The reliability test was accomplished through an immersion in organic solvent and acid/base solution in order to verify the corrosion resistance of the PSPI frame for insulating application. The excellent resistance which is on the order of 108 Ω between two metal lines, shows an outstanding insulating property.

A method for removal of passivation polymer residues from deep reactive ion-etching (DRIE) has been systematically investigated in this study. The method combines dry oxygen plasma ashing and conventional photoresist wet stripping. Samples were carefully examined by x-ray photoelectron spectroscopy (XPS), energy-dispersive x-ray spectroscopy (EDX), and study of surface morphology. XPS and EDX analysis showed that the polymer residues consisted mainly of C-O, CF x (x = 1, 2, 3), and C-CF bonds. Optimized oxygen plasma ashing effectively removes most of the fluorocarbon content, except some nano-residues. Subsequent conventional wet stripping in organic solvents could eliminate these stubborn nanoparticles while dissolving the underlying photoresist. Excellent removal is apparent from scanning electron microscopy images. The fluorine content determined by EDX analysis showed that the residues were completely removed. The metal layers, oxide insulator layers, and the polyimide insulators function well after this critical surface treatment. The excellent results show this is an outstanding method for removal of DRIE passivation polymer residues for MEMS fabrication.

A new and simple method to adjust the scale factor of a magnetic force feedback accelerometer is presented, which could be used in developing a rotating accelerometer gravity gradient instrument (GGI). Adjusting and matching the acceleration-to-current transfer function of the four accelerometers automatically is one of the basic and necessary technologies for rejecting the common mode accelerations in the development of GGI. In order to adjust the scale factor of the magnetic force rebalance accelerometer, an external current is injected and combined with the normal feedback current; they are then applied together to the torque coil of the magnetic actuator. The injected current could be varied proportionally according to the external adjustment needs, and the change in the acceleration-to-current transfer function then realized dynamically. The new adjustment method has the advantages of no extra assembly and ease of operation. Changes in the scale factors range from 33% smaller to 100% larger are verified experimentally by adjusting the different external coefficients. The static noise of the used accelerometer is compared under conditions with and without the injecting current, and the experimental results find no change at the current noise level, which further confirms the validity of the presented method.

Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement.

This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In order to achieve a large dynamic range with an ultrahigh resolution, the capacitive detection system employs two periodic-sensing-array transducers. Each of them can provide numbers for the signal period in the entire operating range. The suspended proof-mass is encapsulated between two glass caps, which results in a three dimensional structure. The measured resonant frequency and quality factor (Q) are 13.2 Hz and 47, respectively. The calibration response of a ±0.7 g input acceleration is presented, and the accelerometer system presents a sensitivity of 122 V/g and a noise floor of 30 ng/√Hz (at 1 Hz, and 1 atm). The bias stability for a period of 10 h is 30 μg. The device has endured a shock up to ±2.6 g, and the full scale output appears to be approximately ±1.4 g presently. This work presents a new opportunity for highly sensitive MEMS fabrication to enable future high-precision measurement applications, such as for gravity measurements.

As the insulation layers between two metal layers, inter-metal dielectric (IMD) films are widely used in integrated circuits (IC) and micro-electromechanical-systems (MEMS) devices. Commonly used IMD materials, such as silicon dioxide and silicon nitride, can be deposited on the metal surface using either physical vapor deposition (PVD) or chemical vapor deposition (CVD). However, due to the imperfections of deposition processes and surface cleanliness, defect-free of an IMD film cannot be guaranteed. As a common defect of an IMD film, pinhole is a tiny via of IMD film that can result in failures of short-circuit or current leakage between two metal layers and therefore decrease the fabrication yield. Reported methods for healing the pinhole defect require light-transmitting substrate, suspended structures, high-temperature annealing processes and none of them is universal. Therefore, we propose a metal etching method that uses metal etchants to etch the underlying metals through the pinholes of the IMD film. The etched area is reasonably larger than the pinhole; therefore, although the following upper metal deposition fills the pinhole, there is no electrical connection between the lower and upper metal features through the pinhole. Results of a series of experiments prove that the proposed method is feasible, valid, operable and reliable. Therefore, the proposed method is promising to be used for many IMD-based applications for either discovering pinholes or healing pinhole induced defects.

Rotating Accelerometer Gravity Gradiometers (RAGGs) play a significant role in applications such as resource exploration and gravity aided navigation. Scale factor calibration is an essential procedure for RAGG instruments before being used. In this paper, we propose a calibration system for a gravity gradiometer to obtain the scale factor effectively, even when there are mass disturbance surroundings. In this system, four metal spring-based accelerometers with a good consistency are orthogonally assembled onto a rotary table to measure the spatial variation of the gravity gradient. By changing the approaching pattern of the reference gravity gradient excitation object, the calibration results are generated. Experimental results show that the proposed method can efficiently and repetitively detect a gravity gradient excitation mass weighing 260 kg within a range of 1.6 m and the scale factor of RAGG can be obtained as (5.4 ± 0.2) E/μV, which is consistent with the theoretical simulation. Error analyses reveal that the performance of the proposed calibration scheme is mainly limited by positioning error of the excitation and can be improved by applying higher accuracy position rails. Furthermore, the RAGG is expected to perform more efficiently and reliably in field tests in the future.

Capacitive micro accelerometers with high sensitivity have found wide applications in geophysics. Reducing the interelectrode spacing, which is determined by the thickness difference between the electrodes and the solder bumps in flip-chip eutectic bonding, is an efficient way to improve the sensitivity of area-varying capacitive transducers in micro accelerometers. Traditional methods require extra materials and processes, and precise control of the thickness of both the solder pumps and the electrodes is necessary. This work introduces a novel method for the precise control of the interelectrode spacing using a three dimensional (3D) electroplating process. Standoff pillars and electrodes are deposited by a single electroplating process with a constant thickness difference, which is only determined by the gap of the seed features that can be precisely determined by photolithography. The standoff pillars are used to define the thickness of the solder bumps in the packaging process. The 3D electroplating process is studied, characterized and applied to a typical high-precision micro capacitive area-varying accelerometer. Experimental results show that the variation of the interelectrode spacing is decreased by more than 6.5 times, when compared to that without the 3D electroplating process. Benefitting from the reduced interelectrode spacing, the sensitivity is increased by more than 3 times, while the resolution is 10 ng (√Hz)−1, which is 2.5 times better. It is believed that such a method can be applied to MEMS devices where interelectrode spacing needs to be precisely controlled.

A method for automatic compensation of misalignment angles during matching the scale factors of two pairs of the accelerometers in developing the rotating accelerometer gravity gradient instrument (GGI) is proposed and demonstrated in this paper. The purpose of automatic scale factor matching of the four accelerometers in GGI is to suppress the common mode acceleration of the moving-based platforms. However, taking the full model equation of the accelerometer into consideration, the other two orthogonal axes which is the pendulous axis and the output axis, will also sense the common mode acceleration and reduce the suppression performance. The coefficients from the two axes to the output are δO and δP respectively, called the misalignment angles. The angle δO, coupling with the acceleration along the pendulous axis perpendicular to the rotational plane, will not be modulated by the rotation and gives little contribution to the scale factors matching. On the other hand, because of coupling with the acceleration along the centripetal direction in the rotating plane, the angle δP would produce a component with 90 degrees phase delay relative to the scale factor component. Hence, the δP component coincides exactly with the sensitive direction of the orthogonal accelerometers. To improve the common mode acceleration rejection, the misalignment angle δP is compensated by injecting a trimming current, which is proportional to the output of an orthogonal accelerometer, into the torque coil of the accelerometer during the scale factor matching. The experimental results show that the common linear acceleration suppression achieved three orders after the scale factors balance and five orders after the misalignment angles compensation, which is almost down to the noise level of the used accelerometers of 1~2 × 10−7 g/√Hz (1 g ≈ 9.8 m/s2).

A subnano-g electrostatic force-rebalanced flexure accelerometer is designed for the rotating accelerometer gravity gradient instrument. This accelerometer has a large proof mass, which is supported inversely by two pairs of parallel leaf springs and is centered between two fixed capacitor plates. This novel design enables the proof mass to move exactly along the sensitive direction and exhibits a high rejection ratio at its cross-axis directions. Benefiting from large proof mass, high vacuum packaging, and air-tight sealing, the thermal Brownian noise of the accelerometer is lowered down to less than 0.2 ng / Hz with a quality factor of 15 and a natural resonant frequency of about 7.4 Hz . The accelerometer’s designed measurement range is about ±1 mg. Based on the correlation analysis between a commercial triaxial seismometer and our accelerometer, the demonstrated self-noise of our accelerometers is reduced to lower than 0.3 ng / Hz over the frequency ranging from 0.2 to 2 Hz, which meets the requirement of the rotating accelerometer gravity gradiometer.

In this paper, we introduce a method of isolating thermal conduction from silicon substrate for accommodating thermal-sensitive micro-devices. This method lies in fabrication of a low-stress photosensitive polyimide (PSPI) suspension structure which has lower thermal conductivity than silicon. First, a PSPI layer was patterned on a silicon wafer and hard baked. Then, a cavity was etched from the backside of the silicon substrate to form a membrane or a bridge-shape PSPI structure. After releasing, a slight deformation of about 20 nm was observed in the suspended structures, suggesting ultralow residual stress which is essential for accommodating micro-devices. In order to investigate the thermal isolation performance of the suspended PSPI structures, micro Pirani vacuum gauges, which are thermal-sensitive, had been fabricated on the PSPI structures. The measurement results illustrated that the Pirani gauges worked as expected in the range from 1– 470 Pa. Moreover, the results of the Pirani gauges based on the membrane and bridge structures were comparable, indicating that the commonly used bridge-shape structure for further reducing thermal conduction was unnecessary. Due to the excellent thermal isolation performance of PSPI, the suspended PSPI membrane is promising to be an outstanding candidate for thermal isolation applications.

We systematically investigate the fabrication and dry-release technology for a high aspect ratio (HAR) structure with vertical and smooth silicon etching sidewalls. One-hundred-micrometer silicon on insulator (SOI) wafers are used in this work. By optimizing the process parameters of inductively coupled plasma deep reactive-ion etching, a HAR (∼25∶1) structure with a microtrench width of 4 μm has been demonstrated. A perfect etching profile has been obtained in which the structures present an almost perfect verticality of 0.10 μm and no sidewall scallops. The root-mean square roughness of silicon sidewalls is 20 to 29 nm. An in situ dry-release method using notching effect is employed after etching. By analysis, we found that the final notch length is typically an aspect-ratio-dependent process. The structure designed in this work has been successfully released by this in situ dry-release method, and the released bottom roughness effectively prohibits the stiction mechanism. The results demonstrate potential applications for design and fabrication of HAR SOI MEMS/MOEMS.