1. A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface.
- Author
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Maleki, Teimour, Chitnis, Girish, Kim, Albert, and Ziaie, Babak
- Subjects
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ACTUATORS , *POLYDIMETHYLSILOXANE , *ELECTRODES , *LITHOGRAPHY , *BENDING moment , *GEOMETRIC surfaces , *ELASTOMERS - Abstract
In this paper, we report on the first laser-micromachined batch-fabricated single-layer elastomeric actuator with a corrugated surface profile. The structural material of the cantilever actuator is a single [polydimethylsiloxane (PDMS)] layer, and electrodes are soft lithographically patterned conductive carbon grease. The asymmetric corrugated surface provides a bending moment in a single PDMS layer without the need for a second inactive layer. An actuator which is 5 mm long, 1 mm wide, and 80 \mu\m thick can generate up to 2-mm out-of-plane displacement with zero applied force and 15 \mu\N at zero deflection while consuming 20 \mu\W of static power when actuated with 500 V. \hfill[2011-0159] [ABSTRACT FROM AUTHOR]
- Published
- 2012
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