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Niobium nitride superconducting nanowire single-photon detectors were fabricated on thermally oxidized silicon substrates with large active areas of 30 μm × 30 μm. To achieve non-constricted detectors, we improved the film growth and electron beam lithography process to fabricate uniform 100-nm wide NbN nanowires with a fill factor of 50%. The devices showed 72.4% system detection efficiency (SDE) at 100-Hz dark count rate (DCR) and 74-ps timing jitter, measured at the fiber communication wavelength of 1550 nm. The highest SDE which is 81.2% when the DCR is ∼700 c/s appears at the wavelength of 1650 nm. [ABSTRACT FROM AUTHOR]

Superconducting nanowire single-photon detectors (SNSPDs) with a composite optical structure composed of phase-grating and optical cavity structures are designed to enhance both the system detection efficiency and the response bandwidth. Numerical simulation by the finite-difference time-domain method shows that the photon absorption capacity of SNSPDs with a composite optical structure can be enhanced significantly by adjusting the parameters of the phase-grating and optical cavity structures at multiple frequency bands. The absorption capacity of the superconducting nanowires reaches 70%, 72%, 60.73%, 61.7%, 41.2%, and 46.5% at wavelengths of 684, 850, 732, 924, 1256, and 1426 nm, respectively. The use of a composite optical structure reduces the total filling factor of superconducting nanowires to only 0.25, decreases the kinetic inductance of SNSPDs, and improves the count rates. [ABSTRACT FROM AUTHOR]