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The two-dimensional electron gas (2DEG) at the non-isostructural interface between spinel γ-Al2O3 and perovskite SrTiO3 is featured by a record electron mobility among complex oxide interfaces in addition to a high carrier density up to the order of 1015 cm-2. Herein, we report on the patterning of 2DEG at the γ-Al2O3/SrTiO3 interface grown at 650 °C by pulsed laser deposition using a hard mask of LaMnO3. The patterned 2DEG exhibits a critical thickness of 2 unit cells of γ-Al2O3 for the occurrence of interface conductivity, similar to the unpatterned sample. However, its maximum carrier density is found to be approximately 3×1013 cm-2, much lower than that of the unpatterned sample (∼1015 cm-2). Remarkably, a high electron mobility of approximately 3600 cm2 V-1 s-1 was obtained at low temperatures for the patterned 2DEG at a carrier density of ∼7×1012 cm-2, which exhibits clear Shubnikov-de Haas quantum oscillations. The patterned high-mobility 2DEG at the γ-Al2O3/SrTiO3 interface paves the way for the design and application of spinel/perovskite interfaces for high-mobility all-oxide electronic devices. [ABSTRACT FROM AUTHOR]

Tunable electronic properties of transition metal oxides and their interfaces offer remarkable functionalities for future devices. The interest in these materials has been boosted with the discovery of a 2D electron gas (2DEG) at SrTiO3 (STO)‐based interfaces. For the majority of these systems, oxygen vacancies play a crucial role in the emergence of interface conductivity, ferromagnetism, and high electron mobility. Despite its great importance, controlling the density and spatial distribution of oxygen vacancies in a dynamic way remains extremely challenging. Here, lithography‐like writing of a metallic state at the interface between SrTiO3 and amorphous Si using X‐ray irradiation is reported. Using a combination of transport techniques and in operando photoemission spectroscopy, it is revealed in real time that the X‐ray radiation induces transfer of oxygen across the interface leading to the on‐demand formation of oxygen vacancies and a 2DEG in STO. The formed 2DEG stays stable in ambient conditions as the interface oxygen vacancies are stabilized by the capping of Si. The study provides a fundamental understanding of X‐ray‐induced redox reactions at the SrTiO3‐based interfaces and in addition shows the potential of X‐ray radiation for patterning stabile conductive pathways for future oxide‐based electronic devices. [ABSTRACT FROM AUTHOR]