1. High-Precision Characterization of Super-Multiperiod AlGaAs/GaAs Superlattices Using X-Ray Reflectometry on a Synchrotron Source.
- Author
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Goray, L. I., Pirogov, E. V., Svechnikov, M. V., Sobolev, M. S., Polyakov, N. K., Gerchikov, L. G., Nikitina, E. V., Dashkov, A. S., Borisov, M. M., Yakunin, S. N., and Bouravleuv, A. D.
- Subjects
X-ray reflectometry ,SUPERLATTICES ,AUDITING standards ,GALLIUM arsenide ,SYNCHROTRONS ,EPITAXY - Abstract
The morphology of supermultiperiod Al
0.3 Ga0.7 As/GaAs superlattices grown by molecular-beam epitaxy has been determined using X-ray reflectometry (including the one on a synchrotron source) and photoluminescence. The layer thicknesses of a superlattice with 100 periods determined in laboratory and synchrotron studies correlate with an error of ~1%. Reflection peaks, which are not observed in measurements on a diffractometer and are likely related to the technological growth features of these structures, are revealed on a synchrotron beginning with high (>4–5) Bragg orders. It is analytically shown that these peaks correspond to modulation in the superlattice with a period that is three to five times larger and characterize the thickness dispersion over the structure depth of a few percent. [ABSTRACT FROM AUTHOR]- Published
- 2021
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