Search

Effects of the thermal treatment and the fabrication process of Pb(Zr0.3Ti0.7)O3 (PZT) thin films using chemical solution deposition on Pt/TiOx electrode stacks were investigated using complementary analytical techniques including atomic force microscopy (AFM), x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, and grazing incidence x-ray reflectivity of synchrotron radiation. The surface and interface structures of the Pt/TiOx electrode stacks with different thermal treatments, and the PZT/Pt/TiOx sample were examined. The propagation of Pt hillocks on the bare Pt/TiOx electrode stacks upon the annealing was observed. AFM observations also revealed that the upper surface of the Pt bottom electrode under PZT thin film became rougher than that of the bare Pt electrode with the same thermal history. Global structural information including the density, surface or interface root-mean-square roughness, and thickness of each constituent layer in the samples were determined using x-ray reflectivity. A density decrease of the Pt layer upon the annealing or during the fabrication of PZT thin films was found from fitting the specular reflectivity, and further confirmed by the negative shift of the Yoneda peak of Pt in the diffuse reflectivity. The formation of Pt hillocks on the bare Pt electrodes was attributed to the compressive stress during the high-temperature annealing caused by the limited incorporation of Ti and O into the Pt layer. Roughening of the PZT/Pt interface was ascribed to the interaction between the compressive stress in Pt and the indentation by the PZT crystallization and grain growth during the annealing. [ABSTRACT FROM AUTHOR]

The authors report the study of polarization fatigue in Pb(Zr,Ti)O3 (PZT) ferroelectric thin films using in situ high-resolution grazing incidence x-ray specular reflectivity of synchrotron radiation. The results demonstrate that there is no formation of a region of different electron densities in the film growth direction with subnanometer depth resolution during fatigue. The upper bounds on the theoretically predicted interfacial accumulation of oxygen vacancies at the interfaces between PZT and Pt electrodes are determined by the comparison of experimental results and theoretical simulations. [ABSTRACT FROM AUTHOR]

Structural investigations of Pb(Zr,Ti)O3 (PZT) ferroelectric thin films derived by chemical solution deposition on Pt/TiOx electrode stacks were performed using grazing incidence x-ray specular reflectivity of synchrotron radiation and transmission electron microscopy. A density inhomogeneity, i.e., a sublayer structure, in the PZT thin films was observed; the upper PZT sublayer had a lower density and the lower sublayer had a higher density. The influence of the density inhomogeneity, as a possible extrinsic contribution to size effects in ferroelectric thin films, was discussed. [ABSTRACT FROM AUTHOR]