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The low thermal conductivity of β-Ga2O3 is a significant concern for maximizing the potential of this ultra-wide bandgap semiconductor as a power switching device technology. Here, we report on the use of nanocrystalline diamond (NCD) deposited via microwave plasma enhanced chemical vapor deposition (MP-CVD) as a top-side, device-level thermal management solution on a lateral β-Ga2O3 transistor. NCD was grown via MP-CVD on β-(AlxGa1−x)2O3/β-Ga2O3 heterostructures prior to the gate formation of the field-effect transistor. A reduced growth temperature of 400 °C and a SiNx barrier layer were used to protect the oxide semiconductors from etching in the MP-CVD H2 plasma environment. Raman spectroscopy showed a highly sp3-bonded NCD film was obtained at 400 °C, with grain size of about 50–100 nm imaged via atomic force microscopy. The incorporation of the NCD heat-spreading layer resulted in a β-(AlxGa1−x)2O3/β-Ga2O3 heterostructure field-effect transistor showing a decrease in the total thermal resistance at the gate by 42%. The fabrication process, including the NCD etch in the gate region, will need to be improved to minimize the impact of these processes on important device characteristics (i.e., drain current, threshold voltage, and leakage current). [ABSTRACT FROM AUTHOR]

This work demonstrates direct, rapid 2D thermal mapping measurement capabilities of the ultrawide bandgap semiconductor channel of lateral β-(AlxGa1−x)2O3/Ga2O3 transistors without sample contamination, long acquisition times, or sophisticated thermometry such as developing deep-ultra-violet compatible thermoreflectance systems. The temperature rise in the channel of a β-(Al0.21Ga0.79)2O3/Ga2O3 heterostructure field-effect transistor (HFET) was mapped using thermoreflectance imaging at 470 nm. First, the thermoreflectance response of the HFET channel was measured using a monochromator, revealing a maximum of the reflectance change around 470–480 nm. Thermoreflectance calibrations were then performed at 470 nm (peak of the reflectance change) and yielded an average thermoreflectance coefficient of 1.06 ± 0.07 × 10−4 K−1. Subsequent measurements of the device (power densities of 0.15–1.47 W/mm and gate-source voltage of 0 V) enabled extraction of a device-level thermal resistance of 51.1 mm·K/W in the channel at the drain-side of the gate. High-resolution, in situ scanning thermal microscopy measurements of the channel temperature rise show good agreement with and further support the thermoreflectance measurements. Finally, the thermal profile across the entire device length (metal electrodes and semiconductor channel) and width was simultaneously measured using thermoreflectance imaging at 470 nm, and the peak temperature rise was measured in the channel at the drain-side of the gate electrode. [ABSTRACT FROM AUTHOR]

Herein, the electrical and thermal performance of lateral AlGaN/GaN high electron mobility transistors (HEMTs) and metal‐insulator‐semiconductor field effect transistors (MISFETs) fabricated with 11 μm thick GaN buffer layers on 200 mm diameter Qromis Substrate Technology (QST) substrates are investigated. The QST substrate has a polycrystalline core engineered to be coefficient of thermal expansion (CTE)‐matched to GaN to minimize wafer bow and residual stress in the GaN film as a result of epitaxial growth. Raman spectroscopy is used to determine the biaxial residual stress in the GaN buffer of the as‐fabricated devices. Electrical characterization is demonstrated on the HEMTs including DC and pulsed output characteristics, DC transfer characteristics, Hall mobility, carrier concentration, sheet resistance, median transition frequency, and maximum stable gain. Finally, the thermal performance of the AlGaN/GaN MISFET is assessed via thermoreflectance thermal imaging at DC power densities up to 19 W mm−1. The thermal resistance of the MISFET, calculated using the peak temperature rises on the gate electrode for DC power densities <10 W mm−1, is measured to be 15.4 mm K W−1, which is comparable with state‐of‐the‐art GaN‐on‐Si lateral transistors. [ABSTRACT FROM AUTHOR]

In this report, the thermal performance of a hydrogen (H)-terminated diamond field-effect transistor (FET) is investigated using Raman spectroscopy and electrothermal device modeling. First, the thermal conductivity (κdiamond) of the active diamond channel was determined by measuring the temperature rise of transmission line measurement structures under various heat flux conditions using nanoparticle-assisted Raman thermometry. Using this approach, κdiamond was estimated to be 1860 W/m K with a 95% confidence interval ranging from 1610 to 2120 W/m K. In conjunction with measured electrical output characteristics, this κ was used as an input parameter for an electrothermal device model of an H-terminated diamond FET. The simulated thermal response showed good agreement with surface temperature measurements acquired using nanoparticle-assisted Raman thermometry. These diamond-based structures were highly efficient at dissipating heat from the active device channel with measured device thermal resistances as low as ∼1 mm K/W. Using the calibrated electrothermal device model, the diamond FET was able to operate at a very high power density of 40 W/mm with a simulated temperature rise of ∼33 K. Finally, the thermal resistance of these lateral diamond FETs was compared to lateral transistor structures based on other ultrawide bandgap materials (Al0.70Ga0.30N, β-Ga2O3) and wide bandgap GaN for benchmarking. These results indicate that the thermal resistance of diamond-based lateral transistors can be up to ∼10× lower than GaN-based devices and ∼50× lower than other UWBG devices. [ABSTRACT FROM AUTHOR]

Ultra-wide bandgap β-gallium oxide (Ga2O3) devices are of considerable interest with potential applications in both power electronics and radio frequency devices. However, current Ga2O3 device technologies are limited by the material's low intrinsic electron mobility and thermal conductivity. The former problem can be addressed by employing modulation-doped β-(AlxGa1−x)2O3/Ga2O3 heterostructures in the device architecture. In this work, (AlxGa1−x)2O3/Ga2O3 modulation-doped field effect transistors (MODFETs) have been investigated from a thermal perspective. Thermoreflectance thermal imaging was used to characterize the self-heating of the MODFETs. The (Al0.18Ga0.82)2O3 thermal conductivity (3.1–3.6 W/mK) was determined using a frequency domain thermoreflectance technique. Electro-thermal modeling was used to discern the effect of design parameters such as substrate orientation and channel length on the device self-heating behavior. Various thermal management schemes were evaluated using the electro-thermal device model. From an electro-thermal co-design perspective, the improvement in electrical performance followed by the mitigation of self-heating was also studied. For example, by employing a Ga2O3-on-SiC composite wafer, which was fabricated in this work, a 50% increase in power handling capability can be achieved as compared to a homoepitaxial device. Furthermore, flip-chip heterointegration and double-sided cooling approaches can lead to more than 2× improvement in the power handling capability. Using an augmented double-sided cooling design that includes nanocrystalline diamond passivation, a 5× improvement in the power handling capability can be accomplished, indicating the potential of the technology upon implementation of a suitable thermal management scheme. [ABSTRACT FROM AUTHOR]