1. Analytical Modeling of Parasitic Capacitance in Inserted-Oxide FinFETs.
- Author
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Singh, Ramendra, Gupta, Anshul, Gupta, Charu, Bansal, Anil K., Hook, Terence B., and Dixit, Abhisek
- Subjects
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ELECTRIC capacity , *FIELD-effect transistors , *COMPUTER-aided design , *COMPUTER-aided engineering , *SIMULATION methods & models - Abstract
An analytical model of parasitic capacitancein inserted-oxide FinFETs (iFinFETs) is proposed. A comparative study on the parasitic capacitance of contemporary multigate devices conforming to 7-nm technology node targets is presented. The proposed model is validated against 3-D Technology Computer-Aided Design (TCAD) simulations. Dependence of the iFinFET parasitic capacitance on device design parameters, such as the inserted-oxide thickness (Tiox) and inserted-oxide recess (Trec), is shown using the proposed model and TCAD simulations. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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