1. Advances in maskless and mask-based optical lithography on plastic flexible substrates
- Author
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Peter Giesen, Marius G. Ivan, Erwin R. Meinders, Ionut Barbu, Michel Van de Moosdijk, and TNO Industrie en Techniek
- Subjects
Semiconducting silicon compounds ,Optical engineering ,Spatial light modulator ,Moisture uptake ,Pixels ,law.invention ,law ,Pulse circuits ,Processing steps ,Industrial Innovation ,Flexible plastic substrates ,In-plane ,In-situ ,Plastic electronics ,Flexible electronics ,Gold coatings ,Light modulators ,New series ,Mask-less lithography ,Flexible display ,Potential growth ,Optoelectronics ,Patterned layers ,Dimensional stability ,Plastics ,Gold-coated ,Photolithography ,Materials science ,Spatial light modulators ,Light modulation ,Nanotechnology ,Optical lithography ,Silicon wafers ,Cost reduction ,Cost of ownership ,Nonlinear deformations ,Plastic flexible ,Mask less ,Electronic paper ,Stepper ,Flexible substrate ,Lithography ,Potential applications ,Substrates ,Plastic foils ,business.industry ,Pixel grid imaging ,Economic analysis ,Fundamental building blocks ,Flexible displays ,Organic light emitting diodes (OLED) ,Optical maskless lithography ,Emerging technologies ,Electronics ,Single layer ,business ,Added values ,Maskless lithography - Abstract
Organic flexible electronics is an emerging technology with huge potential growth in the future which is likely to open up a complete new series of potential applications such as flexible OLED-based displays, urban commercial signage, and flexible electronic paper. The transistor is the fundamental building block of all these applications. A key challenge in patterning transistors on flexible plastic substrates stems from the in-plane nonlinear deformations as a consequence of foil expansion/shrinkage, moisture uptake, baking etc. during various processing steps. Optical maskless lithography is one of the potential candidates for compensating for these foil distortions by in-situ adjustment prior to exposure of the new layer image with respect to the already patterned layers. Maskless lithography also brings the added value of reducing the cost-of-ownership related to traditional mask-based tools by eliminating the need for expensive masks. For the purpose of this paper, single-layer maskless exposures at 355 nm were performed on gold-coated poly(ethylenenaphthalate) (PEN) flexible substrates temporarily attached to rigid carriers to ensure dimensional stability during processing. Two positive photoresists were employed for this study and the results on plastic foils were benchmarked against maskless as well as mask-based (ASML PAS 5500/100D stepper) exposures on silicon wafers. © 2009 Copyright SPIE - The International Society for Optical Engineering.
- Published
- 2009
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