1. An optimized TEM specimen preparation method of quantum nanostructures
- Author
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Peter A. van Aken, Gennadii Laskin, Hongguang Wang, Vesna Srot, Bernhard Fenk, and Jochen Mannhart
- Subjects
010302 applied physics ,Nanostructure ,Condensed Matter - Mesoscale and Nanoscale Physics ,business.industry ,technology, industry, and agriculture ,General Physics and Astronomy ,Polishing ,FOS: Physical sciences ,02 engineering and technology ,Cell Biology ,021001 nanoscience & nanotechnology ,Microstructure ,01 natural sciences ,Focused ion beam ,Amorphous solid ,Lamella (surface anatomy) ,Structural Biology ,Quantum dot ,0103 physical sciences ,Mesoscale and Nanoscale Physics (cond-mat.mes-hall) ,Optoelectronics ,General Materials Science ,Ion milling machine ,0210 nano-technology ,business - Abstract
Electron transparent TEM lamella with unaltered microstructure and chemistry is the prerequisite for successful TEM explorations. Currently, TEM specimen preparation of quantum nanostructures, such as quantum dots (QDs), remains a challenge. In this work, we optimize the sample-preparation routine for achieving high-quality TEM specimens consisting of SrRuO3 (SRO) QDs grown on SrTiO3 (STO) substrates. We demonstrate that a combination of ion-beam-milling techniques can produce higher-quality specimens of quantum nanostructures compared to TEM specimens prepared by a combination of tripod polishing followed by Ar+ ion milling. In the proposed method, simultaneous imaging in a focused ion-beam device enables accurate positioning of the QD regions and assures the presence of dots in the thin lamella by cutting the sample inclined by 5{\deg} relative to the dots array. Furthermore, the preparation of TEM lamellae with several large electron-transparent regions that are separated by thicker walls effectively reduces the bending of the specimen and offers broad thin areas. The final use of a NanoMill efficiently removes the amorphous layer without introducing any additional damage., Comment: 20 pages, 6 figures, 1 table
- Published
- 2022