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For decades, mechanical resonators with high sensitivity have been realized using thin-film materials under high tensile loads. Although there have been remarkable strides in achieving low-dissipation mechanical sensors by utilizing high tensile stress, the performance of even the best strategy is limited by the tensile fracture strength of the resonator materials. In this study, a wafer-scale amorphous thin film is uncovered, which has the highest ultimate tensile strength ever measured for a nanostructured amorphous material. This silicon carbide (SiC) material exhibits an ultimate tensile strength of over 10 GPa, reaching the regime reserved for strong crystalline materials and approaching levels experimentally shown in graphene nanoribbons. Amorphous SiC strings with high aspect ratios are fabricated, with mechanical modes exceeding quality factors 10^8 at room temperature, the highest value achieved among SiC resonators. These performances are demonstrated faithfully after characterizing the mechanical properties of the thin film using the resonance behaviors of free-standing resonators. This robust thin-film material has significant potential for applications in nanomechanical sensors, solar cells, biological applications, space exploration and other areas requiring strength and stability in dynamic environments. The findings of this study open up new possibilities for the use of amorphous thin-film materials in high-performance applications.

Mechanical resonators that possess coupled modes with harmonic frequency relations have recently sparked interest due to their suitability for controllable energy transfer and non-Hermitian dynamics. Here, we show coupled high Q-factor ($>10^4$) modes with a nearly 1:1 frequency relation in spatially-symmetric microresonators. We develop and demonstrate a method to analyze their dynamical behavior based on the simultaneous and resonant detection of both modes, and validate this with experimental results. The frequency difference between the modes modulates their ringdown, and creates a beat pattern in the linear decay. This method applies both to the externally driven and the Brownian motion (thermal) regime, and allows characterization of both linear and nonlinear resonator parameters. The mechanism behind this method renders it broadly applicable to both optical and electrical readout, as well as to different mechanical systems. This will aid studies using near-degenerate mechanical modes, for e.g. optomechanical energy transfer, synchronization and gyroscopic sensors.

The resolution of resonant sensors is fundamentally limited by the presence of noise. Thermomechanical noise, intrinsic to the resonator, sets the ultimate sensor performance when all other noise sources have been eliminated. For linear resonators, the sensing resolution can always be further improved by increasing the driving power. However, this trend cannot continue indefinitely, since at sufficiently high driving powers non-linear effects emerge and influence the noise performance. As a consequence, the resonator's non-linear characteristics play an inextricable role in determining its ultimate resolution limits. Recently, several works have studied the characteristic performance of non-linear resonators as sensors, with the counter intuitive conclusion that increasing the quality factor of a resonator does not improve its sensing resolution at the thermomechanical limit. In this work we further analyze the ultimate resolution limits, and describe different regimes of performance at integration times below and above the resonator's decay time. We provide an analytical model to elucidate the effects of Duffing non-linearity on the resolution of closed-loop sensors, and validate it using numerical simulations. In contrast to previous works, our model and simulations show that under certain conditions the ultimate sensing resolution of a Duffing resonator can be improved by maximizing its quality factor. With measurements on a nanomechanical membrane resonator, we experimentally verify the model and demonstrate that frequency resolutions can be achieved that surpass the previously known limits., Comment: 15 pages, 5 figures

Quantum control of levitated dielectric particles is an emerging subject in quantum optomechanics. A major challenge is to efficiently measure and manipulate the particle’s motion at the Heisenberg uncertainty limit. Here we present a nanophotonic interface suited to address this problem. By optically trapping a 150 nm silica particle and placing it in the near field of a photonic crystal cavity, we achieve tunable single-photon optomechanical coupling of up to g0∕2π 9kHz, three orders of magnitude larger than previously reported for levitated cavity optomechanical systems. Efficient collection and guiding of light through the nanophotonic structure results in a per-photon displacement sensitivity that is increased by two orders of magnitude compared to conventional far-field detection. The demonstrated performance shows a promising route for room temperature quantum optomechanics.