1. A stand-alone compact EUV microscope based on gas-puff target source.
- Author
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TORRISI, ALFIO, WACHULAK, PRZEMYSLAW, WĘGRZYŃSKI, ŁUKASZ, FOK, TOMASZ, BARTNIK, ANDRZEJ, PARKMAN, TOMÁŠ, VONDROVÁ, ŠÁRKA, TURŇOVÁ, JANA, JANKIEWICZ, BARTŁOMIEJ J., BARTOSEWICZ, BARTOSZ, and FIEDOROWICZ, HENRYK
- Subjects
MAGNIFICATION (Optics) ,OPTICAL resolution ,FRESNEL lenses ,LASER plasmas ,ZONE plates ,ULTRAVIOLET microscopy - Abstract
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- Published
- 2017
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