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To improve the technology of glow discharge polymer (GDP) thin film deposition and provide theoretical support for the deposition mechanism of GDP thin films, the plasma properties in a special cylinder (radial small size) inductively coupled plasma (ICP) reactor were investigated. High electron energy was observed in this reactor in contrast to radial large reactors. The electron energy relaxation length $\lambda _{\varepsilon } $ in the elastic range was calculated to determine the electron kinetics transition pressure. The electron energy probability functions were found to change from a bi-Maxwellian distribution to a Maxwellian distribution and then into a Druyvesteyn-like distribution. Furthermore, we observed the association ions $\text{Ar}^{+}(+$ Ar) generated by ion-molecule association reactions. In addition, the profiles of plasma parameters, such as the plasma potential $V_{p}$ , the electron density $n_{e}$ , and the effective electron temperature $T_{\mathrm {eff}}$ , were experimentally investigated with increasing gas pressure. [ABSTRACT FROM AUTHOR]