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Abstract: Low-temperature Sn fusion bonding technique was proposed to fabricate GaN-based blue vertical light-emitting diodes (LEDs) on Si substrate. First, by studying photoluminescence (PL) spectra of GaN LED epilayers/Ag-based mirror/Si structures fabricated at different bonding temperatures, it was confirmed that the quality of Ag-based mirror was not degraded when the bonding temperature was 250°C. Then GaN-based blue vertical LEDs were fabricated at this bonding temperature. As compared with conventional GaN-based LEDs, the vertical LEDs revealed improved forward current–voltage characteristic, especially, the reverse current of the vertical LEDs was as low as 39nA at the reverse bias of −10V. In the mean time, vertical LEDs showed an increase in light output of about 127% at 200mA, and no saturation was observed as the driving current increased to 500mA. Further measurement revealed that vertical LEDs had a much lower junction temperature. These results indicate that the Sn fusion bonding technique is an effective way for fabrication of high-power GaN-based LEDs. [Copyright &y& Elsevier]