1. Complementary Transistors Based on Aligned Semiconducting Carbon Nanotube Arrays
- Author
-
Chenchen Liu, Yu Cao, Bo Wang, Zixuan Zhang, Yanxia Lin, Lin Xu, Yingjun Yang, Chuanhong Jin, Lian-Mao Peng, and Zhiyong Zhang
- Subjects
General Engineering ,General Physics and Astronomy ,General Materials Science - Abstract
High-density semiconducting aligned carbon nanotube (A-CNT) arrays have been demonstrated with wafer-scale preparation of materials and have shown high performance in P-type field-effect transistors (FETs) and great potential for applications in future digital integrated circuits (ICs). However, high-performance N-type FETs (N-FETs) have not yet been implemented with A-CNTs, making development of complementary metal-oxide-semiconductor (CMOS) technology, a necessary component for modern digital ICs, impossible. In this work, we reveal the mechanism hindering the realization of A-CNT N-FETs contacted by low-work-function metals and develop corresponding solutions to promote the performance of N-FETs to that of P-type FETs (P-FETs). The fabricated scandium (Sc)-contacted A-CNT N-FET with a 100 nm gate length exhibits an on-state current (
- Published
- 2022
- Full Text
- View/download PDF