1. Investigation of Microstructures of AlAs Oxides Before and After Oxidation
- Author
-
Jia Hai-Qiang, Mai Zhen-Hong, Jiang Xiao-Ming, Jia Quan-Jie, and Wang Yong
- Subjects
Diffraction ,congenital, hereditary, and neonatal diseases and abnormalities ,Materials science ,business.industry ,Scattering ,nutritional and metabolic diseases ,General Physics and Astronomy ,Heterojunction ,Substrate (electronics) ,Surface finish ,Microstructure ,Amorphous solid ,Optics ,Optoelectronics ,Field-effect transistor ,business - Abstract
The effect of lateral oxidation on microstructures of the GaAs/AlAs/GaAs heterostructure was studied by x-ray specular reflectivity, nonspecular scattering and diffraction. The GaAs/Al2O3/GaAs multilayer was obtained after oxidation of the GaAs/AlAs/GaAs sample. The results show that, before oxidation, there are two 40-A-thick intermixing layers, one located between the AlAs sublayer and the GaAs substrate, and the other between the AlAs sublayer and the upper GaAs sublayer. After oxidation, these two intermixing sublayers disappear. The AlAs was oxidized into amorphous Al2O3 totally. The surface and interface roughnesses of the sample also decrease after oxidation.
- Published
- 2004
- Full Text
- View/download PDF