224 results on '"A. Isella"'
Search Results
2. Chirped Bragg Gratings for On-Chip Pulse Compression in the Mid-Infrared Wavelength Range
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Bricout, Annabelle, Turpaud, Victor, Nguyen, Thi-Hao-Nhi, Dely, Hamza, Koompai, Natnicha, Calcaterra, Stefano, Frigerio, Jacopo, Edmond, Samson, Coudevylle, Jean-René, Herth, Etienne, Alonso-Ramos, Carlos, Vivien, Laurent, Isella, Giovanni, Marris-Morini, Delphine, Witzens, Jeremy, editor, Poon, Joyce, editor, Zimmermann, Lars, editor, and Freude, Wolfgang, editor
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- 2024
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3. Germanium Fabry-Perot nanoresonators investigated by cathodoluminescence spectroscopy
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Mignuzzi Sandro, Wu Xiaofei, Hecht Bert, Frigerio Jacopo, Isella Giovanni, Celebrano Michele, Finazzi Marco, Sapienza Riccardo, and Biagioni Paolo
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dielectric nanoantennas ,cathodoluminescence spectroscopy ,germanium ,Applied optics. Photonics ,TA1501-1820 ,Optics. Light ,QC350-467 - Abstract
We report on the experimental investigation, by means of spatially-resolved cathodoluminescence spectroscopy, of rectangular all-dielectric Ge nanoantennas sustaining Fabry-Perot resonances. The combination of spatial and spectral resolution allows us to directly image the standing-wave pattern of the local density of optical states inside the nanoantennas, which is the fingerprint of the resonant Purcell contribution to the overall emission enhancement previously reported in the literature for the same structures. Our results confirm that the emission properties of Ge nanostructures can be effectively tuned by engineering the local density of optical states and that cathodoluminescence provides valuable information to experimentally address such modulation in their emission properties.
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- 2024
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4. Room Temperature‐Integrated Photodetector between 5 μm and 8 μm Wavelength
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Thi Hao Nhi Nguyen, Natnicha Koompai, Victor Turpaud, Miguel Montesinos-Ballester, Jacopo Frigerio, Stefano Calcaterra, Andrea Ballabio, Xavier Le Roux, Jean- René Coudevylle, Cédric Villebasse, David Bouville, Carlos Alonso-Ramos, Laurent Vivien, Giovanni Isella, and Delphine Marris-Morini
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germanium ,integrated optics ,mid-IR photonics ,photodetection ,silicon photonics ,Applied optics. Photonics ,TA1501-1820 ,Optics. Light ,QC350-467 - Abstract
Mid‐infrared (mid‐IR) optics has a great importance for a large number of applications in sensing, imaging, or even telecommunication. However, high‐speed and room‐temperature‐integrated photodetector (PD) operating in a wide spectrum of the mid‐IR is a critical device that is currently missing for the development of compact and efficient spectroscopic systems exploiting synchronous detection. Herein, a waveguide‐integrated PD based on a Schottky diode embedded in a graded silicon germanium waveguide is demonstrated. Photodetection is obtained in a wide spectral range from 5 to 8 μm wavelength, with responsivity reaching up to 0.1 mA W−1. Photodetection performed in pulsed regime with laser pulse width between 50 and 200 ns indicates an operation beyond 20 MHz. Interestingly, the achieved performances indicate that this device is already suitable for on‐chip signal monitoring, while further improvement can pave the way toward advanced compact and fully integrated spectroscopic systems operating in long‐wave infrared regions.
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- 2023
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5. Germanium-based integrated photonics from near- to mid-infrared applications
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Marris-Morini Delphine, Vakarin Vladyslav, Ramirez Joan Manel, Liu Qiankun, Ballabio Andrea, Frigerio Jacopo, Montesinos Miguel, Alonso-Ramos Carlos, Le Roux Xavier, Serna Samuel, Benedikovic Daniel, Chrastina Daniel, Vivien Laurent, and Isella Giovanni
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silicon photonics ,germanium ,datacom ,mid-infrared ,absorption spectroscopy ,Physics ,QC1-999 - Abstract
Germanium (Ge) has played a key role in silicon photonics as an enabling material for datacom applications. Indeed, the unique properties of Ge have been leveraged to develop high performance integrated photodectors, which are now mature devices. Ge is also very useful for the achievement of compact modulators and monolithically integrated laser sources on silicon. Interestingly, research efforts in these domains also put forward the current revolution of mid-IR photonics. Ge and Ge-based alloys also present strong advantages for mid-infrared photonic platform such as the extension of the transparency window for these materials, which can operate at wavelengths beyond 8 μm. Different platforms have been proposed to take benefit from the broad transparency of Ge up to 15 μm, and the main passive building blocks are now being developed. In this review, we will present the most relevant Ge-based platforms reported so far that have led to the demonstration of several passive and active building blocks for mid-IR photonics. Seminal works on mid-IR optical sensing using integrated platforms will also be reviewed.
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- 2018
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6. Dual-Band Ge-on-Si Photodetector Array With Custom, Integrated Readout Electronics
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Andrea De Iacovo, Federica Mitri, Andrea Ballabio, Jacopo Frigerio, Giovanni Isella, Andrea Ria, Mattia Cicalini, Paolo Bruschi, Lorenzo Colace, De Iacovo, A., Mitri, F., Ballabio, A., Frigerio, J., Isella, G., Ria, A., Cicalini, M., Bruschi, P., and Colace, L.
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Silicon ,Germanium ,SiGe ,Voltage measurement ,dual-band photodetector ,Ge-on-Si ,Dual-band imaging ,ROIC ,Photodiode ,Dark current ,Dual band ,Dual-band photodetector ,Readout electronic ,Electrical and Electronic Engineering ,Instrumentation - Abstract
Photodetectors based on a Ge-on-Si platform were widely studied over the last two decades, rapidly becoming the technology of choice for CMOS-integrated optoelectronic systems operating in the near infrared. Recently, we demonstrated a proof-of-concept device realized with a back-to-back, Ge-on-Si double photodiode with dual-band optical sensitivity and voltage-tunablity characteristics. Such a device represents the cornerstone for the development of integrated imaging systems operating both in the visible and in the near infrared spectral ranges. To achieve this ambitious goal, however, several technology improvements are needed starting from the fabrication of a multipixel array of dual-band photodetectors. Moreover, given the peculiar electronic behavior of the proposed device, specific readout electronics must be developed and integrated onto a CMOS platform. In this paper we demonstrate the operation of a Ge-on-Si multipixel array with a custom-developed readout integrated chip. We show a complete system characterization, also demonstrating its imaging capabilities with a simple experiment for the determination of the intensity profile of two different laser beams.
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- 2022
7. Mid-infrared Integrated Electro-optic Modulator Operating up to 225 MHz between 6.4 and 10.7 μm Wavelength
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Miguel Montesinos-Ballester, Lucas Deniel, Natnicha Koompai, Thi Hao Nhi Nguyen, Jacopo Frigerio, Andrea Ballabio, Virginia Falcone, Xavier Le Roux, Carlos Alonso-Ramos, Laurent Vivien, Adel Bousseksou, Giovanni Isella, and Delphine Marris-Morini
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germanium ,silicon photonics ,mid-infrared ,Electrical and Electronic Engineering ,integrated modulator ,Atomic and Molecular Physics, and Optics ,free-carrier plasma dispersion effect ,integrated photonic circuits ,Biotechnology ,Electronic, Optical and Magnetic Materials - Published
- 2022
8. Dissolution of donor-vacancy clusters in heavily doped n-type germanium
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Slawomir Prucnal, Maciej O Liedke, Xiaoshuang Wang, Maik Butterling, Matthias Posselt, Joachim Knoch, Horst Windgassen, Eric Hirschmann, Yonder Berencén, Lars Rebohle, Mao Wang, Enrico Napolitani, Jacopo Frigerio, Andrea Ballabio, Giovani Isella, René Hübner, Andreas Wagner, Hartmut Bracht, Manfred Helm, and Shengqiang Zhou
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germanium ,vacancies ,doping ,positron annihilation lifetime spectroscopy ,flash lamp annealing ,Science ,Physics ,QC1-999 - Abstract
The n-type doping of Ge is a self-limiting process due to the formation of vacancy-donor complexes (D _n V with n ⩽ 4) that deactivate the donors. This work unambiguously demonstrates that the dissolution of the dominating P _4 V clusters in heavily phosphorus-doped Ge epilayers can be achieved by millisecond-flash lamp annealing at about 1050 K. The P _4 V cluster dissolution increases the carrier concentration by more than three-fold together with a suppression of phosphorus diffusion. Electrochemical capacitance–voltage measurements in conjunction with secondary ion mass spectrometry, positron annihilation lifetime spectroscopy and theoretical calculations enabled us to address and understand a fundamental problem that has hindered so far the full integration of Ge with complementary-metal-oxide-semiconductor technology.
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- 2020
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9. Towards low energy consumption integrated photonic circuits based on Ge/SiGe quantum wells
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Marris-Morini Delphine, Chaisakul Papichaya, Rouifed Mohamed-Saïd, Frigerio Jacopo, Chrastina Daniel, Isella Giovanni, Edmond Samson, Le Roux Xavier, Coudevylle Jean-René, and Vivien Laurent
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quantum wells ,germanium ,silicon ,quantum confined stark effect ,electroluminescence ,epitaxial growth ,Physics ,QC1-999 - Abstract
Despite being an indirect bandgap material, germanium (Ge) recently appeared as a material of choice for low power consumption optical link on silicon. Thanks to a low energy difference between direct and indirect energy bandgap, optical transitions around the direct gap can be used to achieve strong electroabsorption or photodetection in a material already used in microelectronics circuits. However, many challenges have to be addressed such as the growth of germanium-rich structures on silicon or the modeling of these structures around both direct and indirect bandgaps. This paper will explore recent achievements in Ge/SiGe quantum wells structures. Quantum confined Stark effect has been studied for different quantum well designs and light polarization. Both absorption and phase variations have been characterized and will be reported. Carrier recombination processes is also an intense research topic, in order to evaluate the competition between direct and indirect band gap emission as a function of temperature. Main results and conclusion will be introduced. Finally, high performance photonic devices (modulator and photodetector) that have already been demonstrated will be presented. At the end the challenges faced by Ge/SiGe QW as a new photonic platform will be presented.
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- 2013
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10. Spectrally Tunable Germanium-on-silicon Photodetectors: Design and Simulations
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Andrea Ballabio, Lorenzo Colace, Giovanni Isella, Andrea De Iacovo, Jacopo Frigerio, Andrea de Iacovo University Roma Tre,Department of Engineering,Rome,Italy, Lorenzo Colace, Andrea Ballabio, Jacopo Frigerio, Giovanni Isella, de Iacovo, Andrea, Colace, Lorenzo, Ballabio, Andrea, Frigerio, Jacopo, and Isella, Giovanni
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Materials science ,Silicon ,business.industry ,Near-infrared spectroscopy ,chemistry.chemical_element ,Photodetector ,Germanium ,Photodetection ,Responsivity ,chemistry ,Optoelectronics ,business ,Technology CAD ,Diode - Abstract
Germanium-based photodetectors represent the state-of-the-art in Near Infrared (NIR) detection systems when it comes to the monolithic integration with silicon electronics and CMOS compatibility. Germanium-on-silicon devices have been widely studied and several different photodetection schemes have been employed, such as Shottky junctions, pn diodes and phototransistors. Typically, germanium-based photodetectors provide a sensitivity spectrum ranging from the visible to the near infrared (NIR) and their responsivity at shorter wavelengths can be slightly tuned by the applied bias due to the varying extension of the electric field inside the Ge film. In this paper we propose a novel Ge-on-Si photodetector architecture whose spectral response can be completely switched from the visible to the NIR with the application of a proper bias. We provide Technology Computer Aided Design (TCAD) simulations of the device showing how the photodetection performance depend on different fabrication parameters. Finally, we show preliminary results obtained on sample devices.
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- 2019
11. Optical Manipulation of the Rashba Effect in Germanium Quantum Wells.
- Author
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Rossi, Simone, Talamas Simola, Enrico, Raimondo, Marta, Acciarri, Maurizio, Pedrini, Jacopo, Balocchi, Andrea, Marie, Xavier, Isella, Giovanni, and Pezzoli, Fabio
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RASHBA effect ,GERMANIUM ,PIN diodes ,STARK effect ,QUANTUM wells ,CIRCULAR polarization - Abstract
The Rashba effect in Ge/Si0.15Ge0.85 multiple quantum wells embedded in a p‐i‐n diode is studied through polarization and time‐resolved photoluminescence. In addition to a sizeable redshift arising from the quantum‐confined Stark effect, a threefold enhancement of the circular polarization degree of the direct transition is obtained by increasing the pump power over a 2 kW cm−2 range. This marked variation reflects an efficient modulation of the spin population and is further supported by dedicated investigations of the indirect gap transition. This study demonstrates a viable strategy to engineer the spin‐orbit Hamiltonian through contactless optical excitation and opens the way toward the electro‐optical manipulation of spins in quantum devices based on group‐IV heterostructures. [ABSTRACT FROM AUTHOR]
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- 2022
- Full Text
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12. Ge-on-Si based mid-infrared plasmonics
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Giovanni Pellegrini, Andrea Ballabio, Giovanni Isella, Douglas J. Paul, Ross W. Millar, Paolo Biagioni, Daniele Brida, Kevin Gallacher, Leonetta Baldassarre, Jacopo Frigerio, Marco P. Fischer, Michele Ortolani, and Enrico Napolitani
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Materials science ,Silicon photonics ,Silicon ,business.industry ,Germanium ,Doping ,Mid infrared ,chemistry.chemical_element ,Mid-infrared ,Plasmonics ,Sensing ,Wavelength ,chemistry ,Microelectronics ,Optoelectronics ,business ,Plasmon - Abstract
In the last decade, silicon photonics has undergone an impressive development driven by an increasing number of technological applications. Plasmonics has not yet made its way to the microelectronic industry, mostly because of the lack of compatibility of typical plasmonic materials with foundry processes. In this framework, we have developed a plasmonic platform based on heavily n-doped Ge grown on silicon substrates. We developed growth protocols to reach n-doping levels exceeding 1020 cm-3, allowing us to tune the plasma wavelength of Ge in the 3-15 μm range. The plasmonic resonances of Ge-on-Si nanoantennas have been predicted by simulations, confirmed by experimental spectra and exploited for molecular sensing. Our work represents a benchmark for group-IV mid-IR plasmonics.
- Published
- 2021
13. On-Chip Mid-Infrared Supercontinuum Generation from 3 to 13 μm Wavelength
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Miguel Montesinos-Ballester, Xavier Le Roux, Christian Lafforgue, Laurent Vivien, Qiankun Liu, Joan Manel Ramirez, Andrea Barzaghi, Carlos Alonso-Ramos, Giovanni Isella, Vladyslav Vakarin, David Bouville, Delphine Marris-Morini, Jacopo Frigerio, Andrea Ballabio, Centre de Nanosciences et de Nanotechnologies C2N, CNRS, Université Paris-Saclay (C2N), Politecn Milan, LNESS Dipartimento Fis, I-22100 Como, Italy, Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Politecnico di Milano [Milan] (POLIMI), This work was partly supported by the French RENATECH network., European Project: 639107,H2020,ERC-2014-STG,INsPIRE(2015), and European Project
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Materials science ,Physics::Optics ,02 engineering and technology ,7. Clean energy ,01 natural sciences ,Spectral line ,Article ,010309 optics ,0103 physical sciences ,Broadband ,Light beam ,Electrical and Electronic Engineering ,Wideband ,Spectroscopy ,ComputingMilieux_MISCELLANEOUS ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,business.industry ,silicon ,mid-infrared ,021001 nanoscience & nanotechnology ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Supercontinuum ,Wavelength ,germanium ,supercontinuum ,Optoelectronics ,nonlinear ,0210 nano-technology ,business ,integrated circuits ,Biotechnology ,Coherence (physics) - Abstract
International audience; Midinfrared spectroscopy is a universal way to identify chemical and biological substances. Indeed, when interacting with a light beam, most molecules are responsible for absorption at specific wavelengths in the mid-IR spectrum, allowing to detect and quantify small traces of substances. On-chip broadband light sources in the midinfrared are thus of significant interest for compact sensing devices. In that regard, supercontinuum generation offers a mean to efficiently perform coherent light conversion over an ultrawide spectral range, in a single and compact device. This work reports the experimental demonstration of onchip two-octave supercontinuum generation in the mid-infrared wavelength, ranging from 3 to 13 μm (that is larger than 2500 cm −1) and covering almost the full transparency window of germanium. Such an ultrawide spectrum is achieved thanks to the unique features of Ge-rich graded SiGe waveguides, which allow second-order dispersion tailoring and low propagation losses over a wide wavelength range. The influence of the pump wavelength and power on the supercontinuum spectra has been studied. A good agreement between the numerical simulations and the experimental results is reported. Furthermore, a very high coherence is predicted in the entire spectrum. These results pave the way for wideband, coherent, and compact mid-infrared light sources by using a single device and compatible with large-scale fabrication processes.
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- 2020
14. Voltage-tunable dual-band Ge/Si photodetector operating in VIS and NIR spectral range
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Jacopo Frigerio, A. De Iacovo, Giovanni Isella, Andrea Ballabio, Andrea Fabbri, E. Talamas Simola, Lorenzo Colace, Simola, E. Talama, De Iacovo, A., Frigerio, J., Ballabio, A., Fabbri, A., Isella, Giovanni, and Colace, L.
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Materials science ,Silicon ,business.industry ,Near-infrared spectroscopy ,Photodetector ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,7. Clean energy ,Atomic and Molecular Physics, and Optics ,Photodiode ,law.invention ,010309 optics ,Optics ,chemistry ,law ,Fiber laser ,0103 physical sciences ,Multi-band device ,0210 nano-technology ,business ,Low voltage - Abstract
Extending and controlling the spectral range of light detectors is very appealing for several sensing and imaging applications. Here we report on a normal incidence dual band photodetector operating in the visible and near infrared with a bias tunable spectral response. The device architecture is a germanium on silicon epitaxial structure made of two back-to-back connected photodiodes. The photodetectors show a broad photoresponse extending from 390nm to 1600nm with the capability to electronically select the shorter (400-1100 nm) or the longer (1000-1600 nm) portion with a relatively low applied voltage. Devices exhibit peak VIS and NIR responsivities of 0.33 and 0.63 A/W, respectively, a low optical crosstalk (120dB) and, thanks to their low voltage operation, maximum specific detectivities of 7·1011cmHz1/2/W and 2·1010cmHz1/2/W in the VIS and NIR, respectively.
- Published
- 2019
15. Design and Simulation of Ge-on-Si Photodetectors with Electrically Tunable Spectral Response
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Lorenzo Colace, Andrea De Iacovo, Giovanni Isella, Andrea Ballabio, Jacopo Frigerio, De Iacovo, A., Ballabio, A., Frigerio, J., Colace, L., and Isella, G.
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Materials science ,business.industry ,Photoconductivity ,Photodetector ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,7. Clean energy ,Atomic and Molecular Physics, and Optics ,Silicon-germanium ,Photodiode ,law.invention ,chemistry.chemical_compound ,020210 optoelectronics & photonics ,Semiconductor ,chemistry ,law ,0202 electrical engineering, electronic engineering, information engineering ,Optoelectronics ,photodetector ,business ,Device design and simulation ,silicon-germanium ,Visible spectrum ,Diode - Abstract
Germanium-on-silicon technology has been thoroughly studied in the last 20 years and it now reached a high readiness level and it is mature for industrial development. In particular, germanium has been employed in a more-than-Moore pathway for the enhancement of silicon optical properties and the extension of the sensitivity spectrum of Si-based photodetectors. Typically, Ge-on-Si photodetectors exploit the extended visible to near-infrared absorption spectrum of Ge; we propose a dual diode Ge/Si structure where both semiconductors are used for the realization of photodetectors with a tunable sensitivity spectrum that can be completely electrically shifted from the visible to the near infrared wavelength range.
- Published
- 2019
16. Germanium: a semiconducting platform for spin-orbitronics
- Author
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Franco Ciccacci, C. Vergnaud, Adele Marchionni, Alain Marty, Mair Chshiev, Quentin Barbedienne, Matthieu Jamet, Marco Finazzi, Paolo Biagioni, Federico Bottegoni, Nicolas Reyren, T. Guillet, Jean-Marie George, Carlo Zucchetti, Aurélien Masseboeuf, Giovanni Isella, Henri Jaffrès, Albert Fert, Ali Hallal, Hanako Okuno, SPINtronique et TEchnologie des Composants (SPINTEC), Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA)-Centre National de la Recherche Scientifique (CNRS), Dipartimento di Fisica [Politecnico Milano], Politecnico di Milano [Milan] (POLIMI), Unité mixte de physique CNRS/Thales (UMPhy CNRS/THALES), THALES-Centre National de la Recherche Scientifique (CNRS), Modélisation et Exploration des Matériaux (MEM), Université Grenoble Alpes (UGA)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA), Dipartimento di Fisica [Politecnico Milano] (POLIMI), and THALES [France]-Centre National de la Recherche Scientifique (CNRS)
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010302 applied physics ,Materials science ,Magnetoresistance ,Spintronics ,business.industry ,Silicon on insulator ,chemistry.chemical_element ,Germanium ,Substrate (electronics) ,7. Clean energy ,01 natural sciences ,chemistry ,Topological insulator ,Electric field ,0103 physical sciences ,Optoelectronics ,[PHYS.COND]Physics [physics]/Condensed Matter [cond-mat] ,010306 general physics ,business ,ComputingMilieux_MISCELLANEOUS ,Rashba effect - Abstract
Germanium is a very good candidate to host a versatile spintronics platform thanks to its unique spin and optical properties. Recently we focused on two approaches in order to tune the spin-orbit interaction (SOI) in this Ge-based platform. The first one relies on growing high quality epitaxial topological insulators (TIs) on a Ge (111) substrate, we developed an original method to probe the spin-to-charge conversion at the TI/Ge(111) interface by taking advantage of the Ge optical properties. The latter approach is to exploit the intrinsic SOI of Ge (111). By investigating the electrical properties of a thin Ge(111), we found a large unidirectional Rashba magnetoresistance, which we ascribe to the interplay between the externally applied magnetic field and the current-induced pseudo-magnetic field applied in the spin-splitted subsurface states of Ge (111). Both studies open a door towards spin manipulation with electric fields in an all-semiconductor technology platform.
- Published
- 2020
17. Ex-situ doping of epitaxially grown Ge on Si by ion-implantation and pulsed laser melting
- Author
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Giovanni Isella, Enrico Napolitani, Andrea Ballabio, R. Milazzo, Alberto Andrighetto, Jacopo Frigerio, Daniele Scarpa, Giuliana Impellizzeri, and Chiara Carraro
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Diffraction ,Materials science ,Annealing (metallurgy) ,Analytical chemistry ,Laser processing ,General Physics and Astronomy ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,010402 general chemistry ,Epitaxy ,01 natural sciences ,Doping ,business.industry ,Phosphorus ,Surfaces and Interfaces ,General Chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,0104 chemical sciences ,Surfaces, Coatings and Films ,Secondary ion mass spectrometry ,Ion implantation ,chemistry ,Photonics ,0210 nano-technology ,business - Abstract
The integration in Si technology of highly doped of Ge layers with a controlled amount of strain is crucial for nanoelectronic and photonic applications. N-type doping of Ge layers epitaxially grown on Si by P ion-implantation and pulsed laser melting is reported. In particular, samples with or without a post-growth annealing cycle in order to reduce the amount of threading dislocations (TDs) have been studied, in comparison with bulk Ge. Samples have been characterized by Secondary Ion Mass Spectrometry, Van der Paw-Hall and High-Resolution X-ray Diffraction. A very low out-diffusion, 1 × 1020 cm−3 carrier concentration with 100% P activation, as well as an increase of the tensile strain together with an improvement of the crystalline quality is reported, regardless of the as-grown TD density.
- Published
- 2020
18. Characterization of integrated waveguides by atomic-force-microscopy-assisted mid-infrared imaging and spectroscopy
- Author
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Valeria Giliberti, Andrea Ballabio, Douglas J. Paul, Alessia Sorgi, Paolo Biagioni, Michele Ortolani, Jacopo Frigerio, Leonetta Baldassarre, Francesco Rusconi, Giovanni Isella, Kevin Gallacher, and Ross W. Millar
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Diffraction ,Microscope ,Materials science ,Supercontinuum generation ,silicon ,germanium ,infrared spectroscopy, integrated photonics, nanospectroscopy ,nanospectroscopy ,Physics::Optics ,02 engineering and technology ,Grating ,01 natural sciences ,law.invention ,010309 optics ,Optics ,law ,0103 physical sciences ,Spectroscopy ,infrared spectroscopy ,Lithography ,integrated photonics ,business.industry ,021001 nanoscience & nanotechnology ,Atomic and Molecular Physics, and Optics ,Wavelength ,Photonics ,0210 nano-technology ,business ,Waveguide - Abstract
A novel spectroscopy technique to enable the rapid characterization of discrete mid-infrared integrated photonic waveguides is demonstrated. The technique utilizes lithography patterned polymer blocks that absorb light strongly within the molecular fingerprint region. These act as integrated waveguide detectors when combined with an atomic force microscope that measures the photothermal expansion when infrared light is guided to the block. As a proof of concept, the technique is used to experimentally characterize propagation loss and grating coupler response of Ge-on-Si waveguides at wavelengths from 6 to 10 µm. In addition, when the microscope is operated in scanning mode at fixed wavelength, the guided mode exiting the output facet is imaged with a lateral resolution better than 500 nm i.e. below the diffraction limit. The characterization technique can be applied to any mid-infrared waveguide platform and can provide non-destructive in-situ testing of discrete waveguide components.
- Published
- 2020
19. Dual-Band Ge-on-Si Photodetector Array With Custom, Integrated Readout Electronics.
- Author
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De Iacovo, Andrea, Mitri, Federica, Ballabio, Andrea, Frigerio, Jacopo, Isella, Giovanni, Ria, Andrea, Cicalini, Mattia, Bruschi, Paolo, and Colace, Lorenzo
- Abstract
Photodetectors based on a Ge-on-Si platform were widely studied over the last two decades, rapidly becoming the technology of choice for CMOS-integrated optoelectronic systems operating in the near infrared. Recently, we demonstrated a proof-of-concept device realized with a back-to-back, Ge-on-Si double photodiode with dual-band optical sensitivity and voltage-tunability characteristics. Such a device represents the cornerstone for the development of integrated imaging systems operating both in the visible and in the near infrared spectral ranges. To achieve this ambitious goal, however, several technology improvements are needed starting from the fabrication of a multipixel array of dual-band photodetectors. Moreover, given the peculiar electronic behavior of the proposed device, specific readout electronics must be developed and integrated onto a CMOS platform. In this paper we demonstrate the operation of a Ge-on-Si multipixel array with a custom-developed readout integrated chip. We show a complete system characterization, also demonstrating its imaging capabilities with a simple experiment for the determination of the intensity profile of two different laser beams. [ABSTRACT FROM AUTHOR]
- Published
- 2022
- Full Text
- View/download PDF
20. Field-Resolved Response of Plasmonic Antennas
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Daniele Brida, Giovanni Pellegrini, Giovanni Isella, Alfred Leitenstorfer, Nicolò Maccaferri, Kevin Gallacher, Douglas J. Paul, Marco P. Fischer, Jacopo Frigerio, and Paolo Biagioni
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Physics ,Field (physics) ,plasmonics, germanium ,business.industry ,Phase (waves) ,Physics::Optics ,02 engineering and technology ,021001 nanoscience & nanotechnology ,plasmonics ,Experimental strategy ,germanium ,020210 optoelectronics & photonics ,Amplitude ,0202 electrical engineering, electronic engineering, information engineering ,Optoelectronics ,Transient (oscillation) ,0210 nano-technology ,business ,Plasmonic nanostructures ,Plasmon - Abstract
We introduce a new experimental strategy to investigate the transient resonant behavior of plasmonic nanostructures. Our approach allows to access their full-time field-resolved response in amplitude and phase.
- Published
- 2019
21. Field-Resolved Detection of the Temporal Response of a Mid-Infrared Plasmonic Antenna
- Author
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Marco P. Fischer, Kevin Gallacher, Jacopo Frigerio, Giovanni Pellegrini, Giovanni Isella, Alfred Leitenstorfer, Douglas J. Paul, Paolo Biagioni, and Daniele Brida
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germanium ,0103 physical sciences ,02 engineering and technology ,germanium, plasmonics ,021001 nanoscience & nanotechnology ,010306 general physics ,0210 nano-technology ,01 natural sciences ,plasmonics - Published
- 2019
22. Plasmon-enhanced Ge-based metal-semiconductor-metal photodetector at near-IR wavelengths
- Author
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Mario Lodari, Leonetta Baldassarre, Giovanni Isella, Paolo Biagioni, Michele Ortolani, and Monica Bollani
- Subjects
Materials science ,EBL ,Absorption spectroscopy ,metallic grating ,Photodetector ,02 engineering and technology ,Photodetection ,01 natural sciences ,010309 optics ,Plasmonics, Detectors, Germanium ,Optics ,0103 physical sciences ,Absorption (electromagnetic radiation) ,Plasmon ,plasmonic ,Photocurrent ,business.industry ,Germanium ,Detectors ,021001 nanoscience & nanotechnology ,Surface plasmon polariton ,Atomic and Molecular Physics, and Optics ,Semiconductor ,MSM photodetector ,Plasmonics ,0210 nano-technology ,business - Abstract
We demonstrate the use of plasmonic effects to boost the near-infrared sensitivity of metal-semiconductor-metal detectors. Plasmon-enhanced photodetection is achieved by properly optimizing Au interdigitated electrodes, micro-fabricated on Ge, a semiconductor that features a strong near IR absorption. Finite-difference time-domain simulations, photocurrent experiments and Fourier-transform IR spectroscopy are performed to validate how a relatively simple tuning of the contact geometry allows for an enhancement of the response of the device adapting it to the specific detection needs. A 2-fold gain factor in the Ge absorption characteristics is experimentally demonstrated at 1.4 µm, highlighting the potential of this approach for optoelectronic and sensing applications.
- Published
- 2019
23. Ge-rich SiGe-based wideband polarization insensitive photonic platform for mid-infrared free-space communications
- Author
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Jacopo Frigerio, Carlos Alonso-Ramos, Winnie N. Ye, Vladyslav Vakarin, Laurent Vivien, Qiankun Liu, Xavier Le Roux, Delphine Marris-Morini, Giovanni Isella, Joan Manel Ramirez, Pavel Cheben, Andrea Ballabio, Reed, Graham T., Knights, Andrew P., Centre de Nanosciences et de Nanotechnologies [Orsay] (C2N), Université Paris-Sud - Paris 11 (UP11)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Politecn Milan, LNESS Dipartimento Fis, I-22100 Como, Italy, Politecnico di Milano [Milan] (POLIMI), and National Research Council of Canada (NRC)
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birefrinence ,Materials science ,02 engineering and technology ,photonic integrated circuits ,01 natural sciences ,law.invention ,010309 optics ,symbols.namesake ,law ,0103 physical sciences ,mid-IR ,Rayleigh scattering ,Wideband ,Free space communications ,Mid-infrared ,MMI ,Photonic integrated circuits ,Polarization insensitive ,Silicon-germanium ,Waveguides ,free space communications ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,polarization ,Birefringence ,business.industry ,polarization insensitive ,Bandwidth (signal processing) ,Photonic integrated circuit ,silicon ,mid-infrared ,waveguides ,021001 nanoscience & nanotechnology ,Polarization (waves) ,germanium ,symbols ,Optoelectronics ,Photonics ,0210 nano-technology ,business ,Quantum cascade laser ,silicon-germanium - Abstract
The recent advances in the development of quantum cascade laser with room temperature operation in the mid infrared paved the way for the realization of wideband communication systems. Particularly, two mid-infrared atmosphere transparency windows lying between 3-5 μm and between 8-14 μm exhibit great potential for further implementation of wideband free space communications. Additionally this wide unregulated spectral region shows reduced background noise and low Mie and Rayleigh scattering. Despite the development of a plethora of photonic components in mid infrared such as sources, detectors, passive structures, less efforts have been dedicated to investigate polarization management for information transport. In this work, the potential of Ge-rich SiGe waveguides is exploited to build a polarization insensitive platform in the mid-infrared. The gradual index evolution in SiGe alloys and geometric parameter optimization are used to obtain waveguides with birefringence below 2×10-4 and an unprecedented bandwidth in both atmosphere transparency windows i.e. near 3.5 μm and 9 μm. Following waveguide birefringence optimization an ultra-wideband and polarization insensitive multimode interference coupler was designed. The optimized structure shows a 4.5 μm wide bandwidth in transverse electric and transverse magnetic polarization at 9 μm wavelength. The developed ultra-wideband polarization insensitive photonic building blocks presented in this work pave the way for further implementation of free space communication systems in the mid infrared spectral region., Silicon Photonics XIV, February 2-7, 2019, San Francisco, USA, Series: Proceedings of SPIE; no. 10923
- Published
- 2019
- Full Text
- View/download PDF
24. Ge/SiGe asymmetric quantum wells for second harmonic generation in the mid-infrared
- Author
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Jacopo Frigerio, Michele Virgilio, Andrea Mancini, Andrea Ballabio, Daniele Brida, Joel Kuttruff, Jonas Allerbeck, Giovanni Isella, Leonetta Baldassarre, Michele Ortolani, and C. Ciano
- Subjects
Materials science ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,01 natural sciences ,010309 optics ,General Relativity and Quantum Cosmology ,Condensed Matter::Materials Science ,0103 physical sciences ,germanium, quantum wells, nonlinear optics, midinfrared ,Wave function ,midinfrared ,Quantum well ,Valence (chemistry) ,Condensed matter physics ,nonlinear optics ,Second-harmonic generation ,Nonlinear optics ,Heterojunction ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect ,021001 nanoscience & nanotechnology ,Nonlinear system ,germanium ,quantum wells ,chemistry ,Condensed Matter::Strongly Correlated Electrons ,0210 nano-technology - Abstract
In this work we present model calculations and experimental verification of the giant nonlinear coefficients provided by intersubband transitions in hole-doped Ge/SiGe and Si/SiGe asymmetric quantum wells in the mid-infrared. We develop a model for the valence band-structure of the SiGe alloy including heavy-hole, light-hole and split-off bands for any value of Ge concentration, so as to obtain heterojunction parameters for the calculation of the wavefunction of confined hole states in quantum wells.
- Published
- 2019
25. Dissolution of donor-vacancy clusters in heavily doped n-type germanium via millisecond annealing
- Author
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Prucnal, S., Liedke, M. O., Butterling, M., Posselt, M., Wang, X., Knoch, J., Windgassen, H., Hirschmann, E., Berencén, Y., Napolitani, E., Frigerio, J., Ballabio, A., Isella, G., Hübner, R., Wagner, A., Helm, M., and Zhou, S.
- Subjects
germanium ,FLA ,ion implantation ,defects - Abstract
The n-type doping of Ge is self-limiting process due to formation of the vacancy-donor complexes (Dn V with n≤4). Here we report on experiments and density functional theory (DFT) calculations solving the basic problem of donor deactivation in heavily doped Ge. The self-healing process of heavily doped n-type Ge is achieved by rear-side flash lamp annealing (r-FLA) for 20 ms with the peak temperature of about 1050 K. The positron-annihilation lifetime spectroscopy (PALS) reveals that the P4V clusters are main defects in the as-grown Ge:P samples. Millisecond range high-temperature treatment dissociates the phosphorus-vacancy cluster (P4V) and, as shown by SIMS, fully supress the P diffusion. The electrochemical capacitance-voltage (ECV) profiling shows that the effective carrier concentration in P doped Ge (P concentration - 1×1020 cm-3) increases from about 3×1019 cm-3 in as-grown sample to above 8×1019 cm-3 after r-FLA. For the first time using structural (PALS, SIMS) and electrical (ECV) characterization combined with DFT calculations we were able to addressed, explained and solved the fundamental problem hindering the full integration of Ge with CMOS technology.
- Published
- 2019
26. Emission Engineering in Germanium Nanoresonators
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Lamberto Duò, Xiaofei Wu, Michele Celebrano, Milena Baselli, Marco Finazzi, Giovanni Isella, Roman Sordan, Fabio Pezzoli, Bert Hecht, Andrea Farina, Monica Bollani, Daniel Chrastina, Alberto Tosi, Andrea Bahgat Shehata, Johann Osmond, Paolo Biagioni, Adriano Della Frera, Jacopo Frigerio, Celebrano, M, Baselli, M, Bollani, M, Frigerio, J, Bahgat Shehata, A, Della Frera, A, Tosi, A, Farina, A, Pezzoli, F, Osmond, J, Wu, X, Hecht, B, Sordan, R, Chrastina, D, Isella, G, Duò, L, Finazzi, M, and Biagioni, P
- Subjects
waveguide resonators ,Atomic and Molecular Physics, and Optic ,Materials science ,Physics::Optics ,chemistry.chemical_element ,Germanium ,Purcell effect ,germanium emitter ,Waveguide (optics) ,Resonator ,Optics ,optical antenna ,Spontaneous emission ,Electrical and Electronic Engineering ,FIS/03 - FISICA DELLA MATERIA ,Silicon photonics ,silicon photonics ,business.industry ,Electronic, Optical and Magnetic Material ,optical antennas ,waveguide resonator ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Wavelength ,chemistry ,Optoelectronics ,Light emission ,business ,silicon photonic ,Biotechnology - Abstract
We experimentally investigate the smallest germanium waveguide cavity resonators on silicon that can be designed to work around 1.55 mu m wavelength and observe an almost 30-fold enhancement in the collected spontaneous emission per unit volume when compared to a continuous germanium film of the same thickness. The enhancement is due to an effective combination of (i) excitation enhancement at the pump wavelength, (ii) emission enhancement (Purcell effect) at the emission wavelength, and (iii) effective beaming by the nanoresonators, which act as optical antennas to enhance the radiation efficiency. Our results set a basis for the understanding and engineering of light emission based on subwavelength, CMOS-compatible nanostructures operating at telecommunication wavelengths.
- Published
- 2014
27. Delayed plastic relaxation limit in SiGe islands grown by Ge diffusion from a local source.
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Vanacore, G. M., Nicotra, G., Zani, M., Bollani, M., Bonera, E., Montalenti, F., Capellini, G., Isella, G., Osmond, J., Picco, A., Boioli, F., and Tagliaferri, A.
- Subjects
SILICON ,GERMANIUM ,SURFACE diffusion ,ATOMIC force microscopy ,TRANSMISSION electron microscopy ,THERMODYNAMIC equilibrium - Abstract
The hetero-epitaxial strain relaxation in nano-scale systems plays a fundamental role in shaping their properties. Here, the elastic and plastic relaxation of self-assembled SiGe islands grown by surface-thermal-diffusion from a local Ge solid source on Si(100) are studied by atomic force and transmission electron microscopies, enabling the simultaneous investigation of the strain relaxation in different dynamical regimes. Islands grown by this technique remain dislocation-free and preserve a structural coherence with the substrate for a base width as large as 350 nm. The results indicate that a delay of the plastic relaxation is promoted by an enhanced Si-Ge intermixing, induced by the surface-thermal-diffusion, which takes place already in the SiGe overlayer before the formation of a critical nucleus. The local entropy of mixing dominates, leading the system toward a thermodynamic equilibrium, where non-dislocated, shallow islands with a low residual stress are energetically stable. These findings elucidate the role of the interface dynamics in modulating the lattice distortion at the nano-scale, and highlight the potential use of our growth strategy to create composition and strain-controlled nano-structures for new-generation devices. [ABSTRACT FROM AUTHOR]
- Published
- 2015
- Full Text
- View/download PDF
28. Chip-scale integrated photonics for the mid-infrared (Invited paper)
- Author
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Marris-Morini, Delphine, Liu, Qiankun, Ramírez, Joan-Manel, Vakarin, Vladyslav, Ballabio, Andrea, Chrastina, Daniel, Frigerio, Jacopo, Le Roux, Xavier, Serna, Samuel, Cassan, Eric, Benedikovic, Daniel, Alonso-Ramos, Carlos, Vivien, Laurent, Isella, Giovanni, Centre de Nanosciences et de Nanotechnologies [Orsay] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Saclay, Politecnico di Milano [Milan] (POLIMI), Politecn Milan, LNESS Dipartimento Fis, I-22100 Como, Italy, Laboratoire d'Ecologie Microbienne - UMR 5557 (LEM), Centre National de la Recherche Scientifique (CNRS)-Ecole Nationale Vétérinaire de Lyon (ENVL)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de la Recherche Agronomique (INRA)-VetAgro Sup - Institut national d'enseignement supérieur et de recherche en alimentation, santé animale, sciences agronomiques et de l'environnement (VAS), Université Paris-Sud - Paris 11 (UP11)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Institut National de la Recherche Agronomique (INRA)-Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS)-VetAgro Sup - Institut national d'enseignement supérieur et de recherche en alimentation, santé animale, sciences agronomiques et de l'environnement (VAS)-Ecole Nationale Vétérinaire de Lyon (ENVL)
- Subjects
germanium ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,silicon photonics ,silicon-germanium ,mid infrared - Abstract
International audience; Recent works towards the development of Ge-rich SiGe photonic integrated circuits for on-chip mid-IR spectroscopy will be presented. First, the demonstration of ultra-wideband passive circuits will be discussed, followed by the first proofs of concepts towards the realization of efficient wideband active devices. The combination of on-chip integrated spectrometers with on-chip mid-IR sources will provide a solid basis for the development of a competitive mid-IR integrated platform from 3 to 15 µm wavelength.
- Published
- 2018
29. Mid-IR integrated cavity based on Ge-rich graded SiGe waveguides with lateral Bragg grating
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Qiankun Liu, Joan Manel Ramirez, Vladyslav Vakarin, Jacopo Frigerio, Andrea Ballabio, Xavier Le Roux, Carlos Alonso-Ramos, Laurent Vivien, Giovanni Isella, Delphine Marris-Morini, Centre de Nanosciences et de Nanotechnologies [Orsay] (C2N), Université Paris-Sud - Paris 11 (UP11)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Politecnico di Milano [Milan] (POLIMI), Institut d'électronique fondamentale (IEF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), European Project: 639107,H2020,ERC-2014-STG,INsPIRE(2015), Centre de Nanosciences et de Nanotechnologies [Orsay] ( C2N ), Université Paris-Sud - Paris 11 ( UP11 ) -Université Paris-Saclay-Centre National de la Recherche Scientifique ( CNRS ), Politecnico di Milano [Milan], Institut d'électronique fondamentale ( IEF ), Université Paris-Sud - Paris 11 ( UP11 ) -Centre National de la Recherche Scientifique ( CNRS ), European Project : 639107,H2020,ERC-2014-STG,INsPIRE ( 2015 ), and Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Saclay
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germanium, midinfrared, silicon photonics ,Silicon photonics ,Materials science ,silicon photonics ,Physics::Instrumentation and Detectors ,business.industry ,Sensing applications ,Physics::Optics ,chemistry.chemical_element ,Germanium ,germanium ,chemistry ,Fiber Bragg grating ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Optoelectronics ,[ SPI.OPTI ] Engineering Sciences [physics]/Optics / Photonic ,midinfrared ,business - Abstract
International audience; We report the design of a Bragg-mirror based Fabry-Perot cavity integrated on SiGe waveguides working at 7.25 µm. The demonstration of such resonant structures will be a major step forward for sensing applications in mid-infrared.
- Published
- 2018
30. Spin-to-charge conversion for hot photoexcited electrons in germanium
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Federico Bottegoni, Julie Widiez, Carlo Zucchetti, Marco Finazzi, F. Rortais, M. Jamet, Franco Ciccacci, Giovanni Isella, and C. Vergnaud
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Materials science ,chemistry.chemical_element ,Charge (physics) ,Germanium ,02 engineering and technology ,Electron ,021001 nanoscience & nanotechnology ,01 natural sciences ,chemistry ,0103 physical sciences ,Atomic physics ,010306 general physics ,0210 nano-technology ,Spin (physics) - Published
- 2018
31. Ge-rich graded-index Si1-xGex devices for Mid-IR integrated photonics
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Vladyslav Vakarin, D. Benedikovic, Joan Manel Ramirez, Carlos Alonso-Ramos, X. Le Roux, Jacopo Frigerio, Laurent Vivien, Qiankun Liu, Andrea Ballabio, Giovanni Isella, and Delphine Marris-Morini
- Subjects
Materials science ,Silicon photonics ,business.industry ,Photonic integrated circuit ,photonics ,chemistry.chemical_element ,Germanium ,law.invention ,germanium, midinfrared, photonics ,germanium ,Wavelength ,chemistry ,CMOS ,law ,Broadband ,Optoelectronics ,Photonics ,midinfrared ,business ,Waveguide - Abstract
Mid-infrared (mid-IR) silicon photonics is becoming a prominent research with remarkable potential in several applications such as in early medical diagnosis, safe communications, imaging, food safety and many more. In the quest for the best material platform to develop new photonic systems, Si and Ge depart with a notable advantage over other materials due to the high processing maturity accomplished during the last part of the 20th century through the deployment of the CMOS technology. From an optical viewpoint, combining Si with Ge to obtain SiGe alloys with controlled stoichiometry is also of interest for the photonic community since permits to increase the effective refractive index and the nonlinear parameter, providing a fascinating playground to exploit nonlinear effects. Furthermore, using Ge-rich SiGe gives access to a range of deep mid-IR wavelengths otherwise inaccessible (λ ~2-20 μm). In this paper, we explore for the first time the limits of this approach by measuring the spectral loss characteristic over a broadband wavelength range spanning from λ = 5.5 μm to 8.5 μm. Three different SiGe waveguide platforms are compared, each one showing higher compactness than the preceding through the engineering of the vertical Ge profile, giving rise to different confinement characteristics to the propagating modes. A flat propagation loss characteristic of 2-3 dB/cm over the entire wavelength span is demonstrated in Ge-rich graded-index SiGe waveguides of only 6 μm thick. Also, the role of the overlap fraction of the confined optical mode with the Si-rich area at the bottom side of the epitaxial SiGe waveguide is put in perspective, revealing a lossy characteristic compared to the other designs were the optical mode is located in the Ge-rich area at the top of the waveguide uniquely. These Ge-rich graded-index SiGe waveguides may pave the way towards a new generation of photonic integrated circuits operating at deep mid-IR wavelengths.
- Published
- 2018
32. Ge-rich SiGe photonic integrated circuits for mid-IR spectroscopy
- Author
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Marris-Morini, D., Vakarin, V, Liu, Q., Ramirez, J., Ballabio, A, Frigerio, J., Le Roux, X., Serna, S, Cassan, E, Benedikovic, D, Alonso-Ramos, C, Isella, G, Vivien, L, Centre de Nanosciences et de Nanotechnologies [Orsay] (C2N), Université Paris-Sud - Paris 11 (UP11)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Politecnico di Milano [Milan] (POLIMI), and European Project: 639107,H2020,ERC-2014-STG,INsPIRE(2015)
- Subjects
germanium ,mid-IR photonic integrated circuits ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,silicon ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics - Abstract
International audience; Recent works towards the development of Ge-rich SiGe photonic integrated circuits will be presented, such as the demonstration of low-loss waveguides and ultra-wideband Mach Zehnder interferometer from 5.5 to 8.6 µm wavelength, as well as the first steps towards the realization of efficient wideband optical sources.
- Published
- 2018
33. Graded SiGe waveguides with broadband low-loss propagation in the mid infrared
- Author
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Vladyslav Vakarin, Joan Manel Ramirez, Andrea Ballabio, David Bouville, X. Le Roux, Delphine Marris-Morini, Giovanni Isella, Laurent Vivien, Qiankun Liu, Jacopo Frigerio, Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), and Politecnico di Milano [Milan] (POLIMI)
- Subjects
midinfrared, germanium, graded buffer, silicon photonics ,Materials science ,Silicon ,Silicon on insulator ,chemistry.chemical_element ,02 engineering and technology ,01 natural sciences ,010309 optics ,Optics ,0103 physical sciences ,midinfrared ,Absorption (electromagnetic radiation) ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Silicon photonics ,silicon photonics ,business.industry ,Photonic integrated circuit ,graded buffer ,Nonlinear optics ,021001 nanoscience & nanotechnology ,Atomic and Molecular Physics, and Optics ,germanium ,Wavelength ,chemistry ,0210 nano-technology ,business ,Refractive index - Abstract
International audience; Mid-infrared (mid-IR) silicon photonics is expected to lead key advances in different areas including spectroscopy, remote sensing, nonlinear optics or free-space communications, among others. Still, the inherent limitations of the silicon-on-insulator (SOI) technology, namely the early mid-IR absorption of silicon oxide and silicon at λ~3.6 µm and at λ ~8.5 µm respectively, remain the main stumbling blocks that prevent this platform to fully exploit the mid-IR spectrum (λ ~2-20 µm). Here, we propose using a compact Ge-rich graded-index Si1-xGex platform to overcome this constraint. A flat propagation loss characteristic as low as 2-3 dB/cm over a wavelength span from λ = 5.5 µm to 8.5 µm is demonstrated in Ge-rich Si1-xGex waveguides of only 6 µm thick. The comparison of three different waveguides design with different vertical index profiles demonstrates the benefit of reducing the fraction of the guided mode that overlaps with the Si substrate to obtain such flat low loss behavior. Such Ge-rich Si1-xGex platforms may open the route towards the implementation of mid-IR photonic integrated circuits with low-loss beyond the Si multi-phonon absorption band onset, hence truly exploiting the full Ge transparency window up to λ ~15 µm.
- Published
- 2018
34. Modeling the photo-induced inverse spin-Hall effect in Pt/semiconductor junctions
- Author
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Federico Bottegoni, Ermanno Pinotti, Carlo Zucchetti, Giovanni Isella, Franco Ciccacci, and Marco Finazzi
- Subjects
Materials science ,Condensed matter physics ,business.industry ,General Physics and Astronomy ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,Electron ,Photon energy ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect ,021001 nanoscience & nanotechnology ,01 natural sciences ,Gallium arsenide ,chemistry.chemical_compound ,Semiconductor ,chemistry ,0103 physical sciences ,Spin Hall effect ,Diffusion (business) ,010306 general physics ,0210 nano-technology ,Spin (physics) ,business - Abstract
We show that the photon energy dependence of the photo-induced inverse spin-Hall effect (ISHE) signal at Pt/semiconductor junctions can be reproduced by a model that explicitly accounts for the electron spin diffusion length Ls in the semiconductor. In particular, we consider the Pt/GaAs, Pt/Ge, and Pt/Si systems: although optical spin injection and transport of spin-polarized electrons in the conduction band of these semiconductors are ruled by different mechanisms, a simple one dimensional analytical diffusion model, where Ls is the free parameter, can reproduce the ISHE data in all cases. This highlights the potentialities of the photo-induced ISHE spectra as a tool to directly address fundamental spin transport properties in semiconductors.
- Published
- 2018
35. Interfacial sharpness and intermixing in a Ge-SiGe multiple quantum well structure
- Author
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Juri Barthel, Aneeqa Bashir, Andrea Ballabio, Douglas J. Paul, Giovanni Isella, Dominik Kriegner, Ian MacLaren, Ross W. Millar, Kevin Gallacher, Jacopo Frigerio, and Michele Ortolani
- Subjects
010302 applied physics ,Diffraction ,Materials science ,Condensed matter physics ,Electron energy loss spectroscopy ,quantum well ,General Physics and Astronomy ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,germanium ,Annular dark-field imaging ,chemistry ,germanium, quantum well ,0103 physical sciences ,Scanning transmission electron microscopy ,Cathode ray ,ddc:530 ,0210 nano-technology ,Spectroscopy ,Quantum well - Abstract
A Ge-SiGe multiple quantum well structure created by low energy plasma enhanced chemical vapour deposition, with nominal well thickness of 5.4 nm separated by 3.6 nm SiGe spacers, is analysed quantitatively using scanning transmission electron microscopy. Both high angle annular dark field imaging and electron energy loss spectroscopy show that the interfaces are not completely sharp, suggesting that there is some intermixing of Si and Ge at each interface. Two methods are compared for the quantification of the spectroscopy datasets: a self-consistent approach that calculates binary substitutional trends without requiring experimental or computational k-factors from elsewhere and a standards-based cross sectional calculation. Whilst the cross section approach is shown to be ultimately more reliable, the self-consistent approach provides surprisingly good results. It is found that the Ge quantum wells are actually about 95% Ge and that the spacers, whilst apparently peaking at about 35% Si, contain significant interdiffused Ge at each side. This result is shown to be not just an artefact of electron beam spreading in the sample, but mostly arising from a real chemical interdiffusion resulting from the growth. Similar results are found by use of X-ray diffraction from a similar area of the sample. Putting the results together suggests a real interdiffusion with a standard deviation of about 0.87 nm, or put another way—a true width defined from 10%–90% of the compositional gradient of about 2.9 nm. This suggests an intrinsic limit on how sharp such interfaces can be grown by this method and, whilst 95% Ge quantum wells (QWs) still behave well enough to have good properties, any attempt to grow thinner QWs would require modifications to the growth procedure to reduce this interdiffusion, in order to maintain a composition of ≥95% Ge.
- Published
- 2018
36. Germanium-based integrated photonics from near- to mid-infrared applications
- Author
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Delphine Marris-Morini, Laurent Vivien, Qiankun Liu, Jacopo Frigerio, Xavier Le Roux, Joan Manel Ramirez, Samuel Serna, Miguel Montesinos, Vladyslav Vakarin, Daniel Chrastina, Daniel Benedikovic, Carlos Alonso-Ramos, Andrea Ballabio, Giovanni Isella, Centre de Nanosciences et Nanotechnologies (C2N (UMR_9001)), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), and Politecnico di Milano [Milan] (POLIMI)
- Subjects
absorption spectroscopy ,datacom ,germanium ,mid-infrared ,silicon photonics ,Biotechnology ,Electronic, Optical and Magnetic Materials ,Atomic and Molecular Physics, and Optics ,Electrical and Electronic Engineering ,Silicon ,QC1-999 ,Mid infrared ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,7. Clean energy ,01 natural sciences ,mid- infrared ,law.invention ,010309 optics ,law ,Optical sensing ,Atomic and Molecular Physics ,0103 physical sciences ,Electronic ,Optical and Magnetic Materials ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Silicon photonics ,business.industry ,Physics ,021001 nanoscience & nanotechnology ,Laser ,Engineering physics ,Transparency (projection) ,chemistry ,Photonics ,and Optics ,0210 nano-technology ,business - Abstract
Germanium (Ge) has played a key role in silicon photonics as an enabling material for datacom applications. Indeed, the unique properties of Ge have been leveraged to develop high performance integrated photodectors, which are now mature devices. Ge is also very useful for the achievement of compact modulators and monolithically integrated laser sources on silicon. Interestingly, research efforts in these domains also put forward the current revolution of mid-IR photonics. Ge and Ge-based alloys also present strong advantages for mid-infrared photonic platform such as the extension of the transparency window for these materials, which can operate at wavelengths beyond 8 μm. Different platforms have been proposed to take benefit from the broad transparency of Ge up to 15 μm, and the main passive building blocks are now being developed. In this review, we will present the most relevant Ge-based platforms reported so far that have led to the demonstration of several passive and active building blocks for mid-IR photonics. Seminal works on mid-IR optical sensing using integrated platforms will also be reviewed.
- Published
- 2018
37. Ge-rich SiGe photonic-integrated circuits for mid-IR spectroscopy
- Author
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Carlos Alonso-Ramos, Eric Cassan, Vladyslav Vakarin, Giovanni Isella, Laurent Vivien, Qiankun Liu, Andrea Ballabio, Delphine Marris-Morini, X. Le Roux, Jacopo Frigerio, Joan Manel Ramirez, Daniel Benedikovic, and Samuel Serna
- Subjects
Materials science ,Silicon ,germanium ,mid-IR photonic integrated circuits ,silicon ,business.industry ,Photonic integrated circuit ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Mach–Zehnder interferometer ,01 natural sciences ,010309 optics ,Wavelength ,chemistry ,0103 physical sciences ,Optoelectronics ,Wideband ,0210 nano-technology ,Spectroscopy ,business ,Realization (systems) - Abstract
Recent works towards the development of Ge-rich SiGe photonic integrated circuits will be presented, such as the demonstration of low-loss waveguides and ultra-wideband Mach Zehnder interferometer from 5.5 to 8.6 μm wavelength, as well as the first steps towards the realization of efficient wideband optical sources.
- Published
- 2018
38. Benchmarking the Use of Heavily Doped Ge for Plasmonics and Sensing in the Mid-Infrared
- Author
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Michele Ortolani, Valeria Giliberti, Leonetta Baldassare, Giovanni Isella, Douglas J. Paul, Giovanni Pellegrini, Kevin Gallacher, Jacopo Frigerio, and Paolo Biagioni
- Subjects
Materials science ,Silicon ,Orders of magnitude (temperature) ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,01 natural sciences ,germanium ,heavy-doping ,mid-infrared ,plasmonics ,sensing ,0103 physical sciences ,Figure of merit ,Electrical and Electronic Engineering ,010306 general physics ,Plasmon ,business.industry ,Doping ,021001 nanoscience & nanotechnology ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Semiconductor ,chemistry ,Optoelectronics ,0210 nano-technology ,business ,Biotechnology ,Microfabrication - Abstract
Despite the recent introduction of heavily doped semiconductors for mid-infrared plasmonics, it still remains an open issue whether such materials can compete with noble metals. A whole set of figures of merit are employed to thoroughly assess the use of heavily doped Ge on Si as a mid-infrared plasmonic material and benchmark it against standard noble metals such as Au. A full-wave electrodynamics framework is used to model and design high-performance, silicon-foundry compatible mid-infrared plasmonic sensors based on experimental material data reaching plasma wavelengths down to λp ∼ 3.1 μm. It is finally shown that Ge sensors can provide signal enhancements for vibrational spectroscopy above the 3 orders of magnitude, thus, representing a promising alternative to noble metals, leveraging the full compatibility with the silicon foundry microfabrication processes.
- Published
- 2018
39. Magnetotransport in Bi2Se3 thin films epitaxially grown on Ge(111)
- Author
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C. Vergnaud, Giovanni Isella, Matthieu Jamet, Jacopo Frigerio, Paul Noël, T. Guillet, M.-T. Dau, Alain Marty, C. Beigné, SPINtronique et TEchnologie des Composants (SPINTEC), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Politecnico di Milano [Milan] (POLIMI), ANR-16-CE24-0017,TOP-RISE,Isolant topologique et etats d'interfaces Rashba pour l'électronique de spin(2016), ANR-10-LABX-0051,LANEF,Laboratory of Alliances on Nanosciences - Energy for the Future(2010), and European Project: 766955,microSPIRE
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Materials science ,FOS: Physical sciences ,General Physics and Astronomy ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,01 natural sciences ,Condensed Matter::Materials Science ,0103 physical sciences ,Microelectronics ,[PHYS.COND]Physics [physics]/Condensed Matter [cond-mat] ,Thin film ,010306 general physics ,Surface states ,Condensed Matter - Materials Science ,Condensed matter physics ,business.industry ,Materials Science (cond-mat.mtrl-sci) ,Biasing ,021001 nanoscience & nanotechnology ,lcsh:QC1-999 ,3. Good health ,Semiconductor ,chemistry ,Topological insulator ,Spin diffusion ,Condensed Matter::Strongly Correlated Electrons ,0210 nano-technology ,business ,lcsh:Physics - Abstract
Topological insulators (TIs) like Bi$_2$Se$_3$ are a class of material with topologically protected surface states in which spin-momentum locking may enable spin-polarized and defect-tolerant transport. In this work, we achieved the epitaxial growth of Bi$_2$Se$_3$ thin films on germanium, which is a key material for microelectronics. Germanium also exhibits interesting properties with respect to the electron spin such as a spin diffusion length of several micrometers at room temperature. By growing Bi$_2$Se$_3$ on germanium, we aim at combining the long spin diffusion length of Ge with the spin-momentum locking at the surface of Bi$_2$Se$_3$. We first performed a thorough structural analysis of Bi$_2$Se$_3$ films using electron and x-ray diffraction as well as atomic force microscopy. Then, magnetotransport measurements at low temperature showed the signature of weak antilocalization as a result of two-dimensional transport in the topologically protected surface states of Bi$_2$Se$_3$. Interestingly, the magnetotransport measurements also point out that the conduction channel can be tuned between the Bi$_2$Se$_3$ film and the Ge layer underneath by means of the bias voltage or the applied magnetic field. This result suggests that the Bi$_2$Se$_3$/Ge junction is a promising candidate for tuning spin-related phenomena at interfaces between TIs and semiconductors., 18 pages, 8 figures
- Published
- 2018
40. Self-aligned Ge and SiGe three-dimensional epitaxy on dense Si pillar arrays
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Claudiu V. Falub, Philippe Niedermann, Fabio Isa, H. von Känel, Leo Miglio, Giovanni Isella, Roberto Bergamaschini, Elisabeth Müller, Bergamaschini, R, Isa, F, Falub, C, Niedermann, P, Müller, E, Isella, G, von Känel, H, and Miglio, L
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Ge ,Materials science ,Silicon ,chemistry.chemical_element ,Nanotechnology ,Germanium ,Substrate (electronics) ,pattern ,Epitaxy ,Thermal expansion ,Crystal ,Materials Chemistry ,FIS/03 - FISICA DELLA MATERIA ,business.industry ,Metals and Alloys ,Surfaces and Interfaces ,General Chemistry ,Rate equation ,Condensed Matter Physics ,Heteroepitaxy ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,chemistry ,Optoelectronics ,Si ,Dislocation ,business - Abstract
In this report we present a novel strategy in selective epitaxial growth on top of Si pillars, which results in a tessellated Ge film, composed by self-aligned micron-sized crystals in a maskless process. Modelling by rate equations the morphology evolution of fully facetted crystal profiles is extensively outlined, showing an excellent prediction of the peculiar role played by flux shielding among microcrystals, in the case of dense array configuration. Crack formation and substrate bending, caused by the mismatch in thermal expansion coefficients, are eliminated by the mechanical decoupling among individual microcrystals, which are also shown to be dislocation- and strain-free. The method has been also tested for Si 1− x Ge x alloys, with compositions ranging from pure silicon to pure germanium. There are ample reasons to believe that this approach could be extended to other material combinations and substrate orientations, actually providing a technology platform for several device applications.
- Published
- 2013
41. Midinfrared Plasmon-Enhanced Spectroscopy with Germanium Antennas on Silicon Substrates
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Kevin Gallacher, Jacopo Frigerio, Paolo Biagioni, Michele Ortolani, Leonetta Baldassarre, Douglas J. Paul, Giovanni Isella, Eugenio Calandrini, Antonio Samarelli, Emilie Sakat, Dipartimento di Fisica, Universita di Roma La Sapienza, Università degli Studi di Roma 'La Sapienza' = Sapienza University [Rome], Center for Life Nano Science@Sapienza, Istituto Italiano di Tecnologia (IIT), INFM-Dipartimento di Fisica-Politecnico di Milano, Istituto Nazionale di Fisica Nucleare (INFN), Politecnico di Milano [Milan] (POLIMI), James Watt School of Engineering [Univ Glasgow], University of Glasgow, and Politecn Milan, LNESS Dipartimento Fis, I-22100 Como, Italy
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Materials science ,Silicon ,mid-infrared spectroscopy ,Orders of magnitude (temperature) ,Silicon technology ,chemistry.chemical_element ,Bioengineering ,Germanium ,Nanotechnology ,Substrate (electronics) ,Epitaxy ,plasmonics ,Hardware_GENERAL ,Hardware_INTEGRATEDCIRCUITS ,General Materials Science ,QC ,Plasmon ,silicon technology ,explosives detection ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,business.industry ,Mechanical Engineering ,Chemistry (all) ,Doping ,General Chemistry ,Condensed Matter Physics ,Semiconductor ,chemistry ,Materials Science (all) ,business - Abstract
International audience; Midinfrared plasmonic sensing allows the direct targeting of unique vibrational fingerprints of molecules. While gold has been used almost exclusively so far, recent research has focused on semiconductors with the potential to revolutionize plasmonic devices. We fabricate antennas out of heavily doped Ge films epitaxially grown on Si wafers and demonstrate up to 2 orders of magnitude signal enhancement for the molecules located in the antenna hot spots compared to those located on a bare silicon substrate. Our results set a new path toward integration of plasmonic sensors with the ubiquitous CMOS platform.
- Published
- 2015
42. Thin SiGe virtual substrates for Ge heterostructures integration on silicon.
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Cecchi, S., Gatti, E., Chrastina, D., Frigerio, J., Müller Gubler, E., Paul, D. J., Guzzi, M., and Isella, G.
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SILICON ,GERMANIUM ,HETEROSTRUCTURES ,SUBSTRATES (Materials science) ,QUANTUM wells ,PHOTOLUMINESCENCE ,ABSORPTION - Abstract
The possibility to reduce the thickness of the SiGe virtual substrate, required for the integration of Ge heterostructures on Si, without heavily affecting the crystal quality is becoming fundamental in several applications. In this work, we present 1 μm thick Si
1-x Gex buffers (with x>0.7) having different designs which could be suitable for applications requiring a thin virtual substrate. The rationale is to reduce the lattice mismatch at the interface with the Si substrate by introducing composition steps and/or partial grading. The relatively low growth temperature (475 °C) makes this approach appealing for complementary metal-oxide-semiconductor integration. For all the investigated designs, a reduction of the threading dislocation density compared to constant composition Si1-x Gex layers was observed. The best buffer in terms of defects reduction was used as a virtual substrate for the deposition of a Ge/SiGe multiple quantum well structure. Room temperature optical absorption and photoluminescence analysis performed on nominally identical quantum wells grown on both a thick graded virtual substrate and the selected thin buffer demonstrates a comparable optical quality, confirming the effectiveness of the proposed approach. [ABSTRACT FROM AUTHOR]- Published
- 2014
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43. Strong confinement-induced engineering of the g factor and lifetime of conduction electron spins in Ge quantum wells
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E Vitiello, Emanuele Grilli, S Paleari, Anna Giorgioni, Stefano Cecchi, Marco Fanciulli, Fabio Pezzoli, Wolfgang Jantsch, Giovanni Isella, Giorgioni, A, Paleari, S, Cecchi, S, Vitiello, E, Grilli, E, Isella, G, Jantsch, W, Fanciulli, M, and Pezzoli, F
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Science ,General Physics and Astronomy ,02 engineering and technology ,Electron ,01 natural sciences ,General Biochemistry, Genetics and Molecular Biology ,Article ,spectrum ,Condensed Matter::Materials Science ,Physics and Astronomy (all) ,stress ,relaxation ,0103 physical sciences ,010306 general physics ,Spin (physics) ,spintronic ,Quantum well ,Physics ,Multidisciplinary ,Biochemistry, Genetics and Molecular Biology (all) ,Condensed matter physics ,Spintronics ,condensed matter physics, semiconductor, g-factor, spin lifetime, spin, germanium, silicon, heterostructure, quantum wells, spintronics ,Chemistry (all) ,silicon ,Spin engineering ,Heterojunction ,General Chemistry ,semiconductor ,021001 nanoscience & nanotechnology ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect ,resonance experiment ,shallow donor ,germanium ,FIS/01 - FISICA SPERIMENTALE ,Quantum dot ,Orbital motion ,Condensed Matter::Strongly Correlated Electrons ,0210 nano-technology - Abstract
Control of electron spin coherence via external fields is fundamental in spintronics. Its implementation demands a host material that accommodates the desirable but contrasting requirements of spin robustness against relaxation mechanisms and sizeable coupling between spin and orbital motion of the carriers. Here, we focus on Ge, which is a prominent candidate for shuttling spin quantum bits into the mainstream Si electronics. So far, however, the intrinsic spin-dependent phenomena of free electrons in conventional Ge/Si heterojunctions have proved to be elusive because of epitaxy constraints and an unfavourable band alignment. We overcome these fundamental limitations by investigating a two-dimensional electron gas in quantum wells of pure Ge grown on Si. These epitaxial systems demonstrate exceptionally long spin lifetimes. In particular, by fine-tuning quantum confinement we demonstrate that the electron Landé g factor can be engineered in our CMOS-compatible architecture over a range previously inaccessible for Si spintronics., Ge/Si heterojunctions are prominent candidates for spintronics, but the spin-dependent phenomena have been elusive. Here, Giorgioni et al. report long spin relaxation and coherence times in a two dimensional electron gas confined in quantum wells of pure Ge grown on SiGe-buffered Si substrates.
- Published
- 2016
44. Third Order Nonlinear Optical Properties of Ge-Rich SiGe Waveguides (Orale)
- Author
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Serna, Samuel, Vakarin, Vladyslav, Manel Ramírez, Joan, Le Roux, Xavier, Frigerio, Jacopo, Ballabio, Andrea, Vivien, Laurent, Isella, Giovanni, Cassan, Eric, Dubreuil, Nicolas, Marris-Morini, Delphine, Centre de Nanosciences et de Nanotechnologies [Orsay] (C2N), Université Paris-Sud - Paris 11 (UP11)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Politecnico di Milano [Milan] (POLIMI), Laboratoire Charles Fabry / Manolia, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), European Project: 639107,H2020,ERC-2014-STG,INsPIRE(2015), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Saclay, and Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)
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Silicon ,bandgap engineering ,Germanium ,Integrated photonics ,nonlinear optics ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics - Abstract
International audience; We report on the first third order nonlinear experimental characterization of Ge-rich Si 1-x Ge x waveguides, with Germanium concentrations x ranging from 0.7 to 0.9. The experimental values will be compared with theoretical models. These results will provide helpful insights to assist the design of nonlinear integrated optical based devices in both the near-and mid-IR wavelength ranges.
- Published
- 2017
45. Erratum: Imaging spin diffusion in germanium at room temperature [Phys. Rev. B 96 , 014403 (2017)]
- Author
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Franco Ciccacci, C. Vergnaud, Lavinia Ghirardini, G. Isella, Federico Bottegoni, M. Jamet, Marco Finazzi, F. Rortais, Andrea C. Ferrari, Michele Celebrano, Carlo Zucchetti, and Alain Marty
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010302 applied physics ,Materials science ,Condensed matter physics ,chemistry ,0103 physical sciences ,Spin diffusion ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,021001 nanoscience & nanotechnology ,0210 nano-technology ,01 natural sciences - Published
- 2017
46. Imaging spin diffusion in germanium at room temperature
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Matthieu Jamet, C. Vergnaud, Federico Bottegoni, Alberto Ferrari, Lavinia Ghirardini, Marco Finazzi, Franco Ciccacci, Giovanni Isella, Alain Marty, Michele Celebrano, Carlo Zucchetti, Fabian Rortais, Politecn Milan, LNESS Dipartimento Fis, I-22100 Como, Italy, SPINtronique et TEchnologie des Composants (SPINTEC), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), and ANR-13-BS10-0002,SiGeSPIN,Spintronique dans le silicium et le germanium(2013)
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Materials science ,Condensed matter physics ,Spins ,chemistry.chemical_element ,Inverse ,Germanium ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Tunnel magnetoresistance ,Condensed Matter::Materials Science ,Nuclear magnetic resonance ,chemistry ,Ferromagnetism ,0103 physical sciences ,Spin diffusion ,Condensed Matter::Strongly Correlated Electrons ,[PHYS.COND]Physics [physics]/Condensed Matter [cond-mat] ,010306 general physics ,0210 nano-technology ,Realization (systems) ,Spin-½ - Abstract
We report on the nonlocal detection of optically oriented spins in lightly $n$-doped germanium at room temperature. Localized spin generation is achieved by scanning a circularly polarized laser beam ($\ensuremath{\lambda}=1550$ nm) on an array of lithographically defined Pt microstructures. The in-plane oriented spin generated at the edges of such microstructures, placed at different distances from a spin-detection element, allows for a direct imaging of spin diffusion in the semiconductor, leading to a measured spin diffusion length of about $10\phantom{\rule{4pt}{0ex}}\ensuremath{\mu}\mathrm{m}$. Two different spin-detection blocks are employed, consisting of either a magnetic tunnel junction or a platinum stripe where the spin current is converted in an electrical signal by the inverse spin-Hall effect. The second solution represents the realization of a nonlocal spin-injection/detection scheme that is completely free from ferromagnetic functional blocks.
- Published
- 2017
47. Electro-Refraction in Standard and Symmetrically Coupled Ge/SiGe Quantum Wells
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Daniel Chrastina, Xavier Le Roux, Delphine Marris-Morini, Vladyslav Vakarin, Marco Leone, Andrea Ballabio, Giovanni Isella, Jacopo Frigerio, Laurent Vivien, Papichaya Chaisakul, Politecnico di Milano [Milan] (POLIMI), Institut d'électronique fondamentale (IEF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Centre de Nanosciences et de Nanotechnologies [Orsay] (C2N), Université Paris-Sud - Paris 11 (UP11)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), and Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Saclay
- Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,Silicon photonics ,Materials science ,business.industry ,Germanium ,chemistry.chemical_element ,Physics::Optics ,Modulators ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect ,Refraction ,Quantum Wells ,Silicon Photonics ,Materials Science (all) ,chemistry ,Optoelectronics ,General Materials Science ,business ,Quantum well - Abstract
International audience; Electro-refraction in standard (sQW) and coupled (cQW) Ge/SiGe quantum wells grown on Si have been investigated by means of optical transmission measurements performed on planar waveg-uides. The anomalous Quantum confined Stark Effect observed in the coupled quantum well structure strongly enhance the electro-refractive effect with respect to sQW.
- Published
- 2017
48. Ultra-wideband Ge-rich silicon germanium integrated Mach-Zehnder interferometer for mid-infrared spectroscopy
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Laurent Vivien, Qiankun Liu, Vladyslav Vakarin, Joan Manel Ramirez, Xavier Le Roux, Jacopo Frigerio, Delphine Marris-Morini, Andrea Ballabio, David Bouville, Giovanni Isella, Centre de Nanosciences et de Nanotechnologies [Orsay] (C2N), Université Paris-Sud - Paris 11 (UP11)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Dipartimento di Fisica [Milano], Politecnico di Milano [Milan] (POLIMI), European Project: 639107,H2020,ERC-2014-STG,INsPIRE(2015), and Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Saclay
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Optical devices ,Materials science ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,Mach–Zehnder interferometer ,01 natural sciences ,010309 optics ,chemistry.chemical_compound ,Optics ,Atomic and Molecular Physics ,0103 physical sciences ,Broadband ,Astronomical interferometer ,Optical design and fabrication ,OCIS: 130.0130, 230.0230, 220.0220 ,Extinction ratio ,Spectrometer ,business.industry ,Photonic integrated circuit ,Integrated optics ,021001 nanoscience & nanotechnology ,Atomic and Molecular Physics, and Optics ,Silicon-germanium ,chemistry ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Optoelectronics ,and Optics ,0210 nano-technology ,business - Abstract
International audience; This Letter explores the use of Ge-rich Si 0.2 Ge 0.8 wave-guides on graded Si 1−x Ge x substrate for the demonstration of ultra-wideband photonic integrated circuits in the mid-infrared (mid-IR) wavelength range. We designed, fabricated , and characterized broadband Mach–Zehnder inter-ferometers fully covering a range of 3 μm in the mid-IR band. The fabricated devices operate indistinctly in quasi-TE and quasi-TM polarizations, and have an extinction ratio higher than 10 dB over the entire operating wavelength range. The obtained results are in good correlation with theoretical predictions, while numerical simulations indicate that the device bandwidth can reach one octave with low additional losses. This Letter paves the way for further realization of mid-IR integrated spectrometers using low-index-contrast Si 1−x Ge x waveguides with high germanium concentration.
- Published
- 2017
49. Third order nonlinear optical properties of Ge-Rich SiGe waveguides
- Author
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Delphine Marris-Morini, Nicolas Dubreuil, Andrea Ballabio, Joan Manel Ramirez, Laurent Vivien, Giovanni Isella, Samuel Serna, Vladyslav Vakarin, Jacopo Frigerio, Xavier Le Roux, and Eric Cassan
- Subjects
Silicon ,Materials science ,Nonlinear optics ,Computer Networks and Communications ,Integrated photonics ,chemistry.chemical_element ,Germanium ,02 engineering and technology ,01 natural sciences ,Waveguide (optics) ,010309 optics ,Optics ,Atomic and Molecular Physics ,0103 physical sciences ,Instrumentation ,Silicon photonics ,business.industry ,Microstructured optical fiber ,021001 nanoscience & nanotechnology ,Wavelength ,Nonlinear system ,chemistry ,Bandgap engineering ,Atomic and Molecular Physics, and Optics ,Optoelectronics ,Photonics ,and Optics ,0210 nano-technology ,business - Abstract
We report on the first third order nonlinear experimental characterization of Ge-rich Si 1.x Ge x waveguides, with Germanium concentrations x ranging from 0.7 to 0.9. The experimental values will be compared with theoretical models. These results will provide helpful insights to assist the design of nonlinear integrated optical based devices in both the near- and mid-IR wavelength ranges.
- Published
- 2017
50. Non-local electrical spin injection and detection in germanium at room temperature
- Author
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Céline Vergnaud, Alain Marty, Michele Celebrano, Carlo Zucchetti, Jean-Philippe Attané, Julie Widiez, Henri Jaffrès, Matthieu Jamet, Alberto Ferrari, F. Rortais, Federico Bottegoni, Giovanni Isella, Franco Ciccacci, Jean-Marie George, Marco Finazzi, Lavinia Ghirardini, SPINtronique et TEchnologie des Composants (SPINTEC), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Politecnico di Milano [Milan] (POLIMI), Unité mixte de physique CNRS/Thales (UMPhy CNRS/THALES), THALES-Centre National de la Recherche Scientifique (CNRS), ANR-13-BS10-0002,SiGeSPIN,Spintronique dans le silicium et le germanium(2013), and THALES [France]-Centre National de la Recherche Scientifique (CNRS)
- Subjects
Materials science ,Physics and Astronomy (miscellaneous) ,Silicon ,chemistry.chemical_element ,FOS: Physical sciences ,Germanium ,02 engineering and technology ,01 natural sciences ,Electric charge ,Signal ,Condensed Matter::Materials Science ,0103 physical sciences ,[PHYS.COND]Physics [physics]/Condensed Matter [cond-mat] ,010306 general physics ,Spin (physics) ,Condensed Matter - Materials Science ,business.industry ,Materials Science (cond-mat.mtrl-sci) ,021001 nanoscience & nanotechnology ,3. Good health ,Tunnel magnetoresistance ,Semiconductor ,chemistry ,Optoelectronics ,Charge carrier ,0210 nano-technology ,business - Abstract
Non-local carrier injection/detection schemes lie at the very foundation of information manipulation in integrated systems. This paradigm consists in controlling with an external signal the channel where charge carriers flow between a "source" and a well separated "drain". The next generation electronics may operate on the spin of carriers instead of their charge and germanium appears as the best hosting material to develop such a platform for its compatibility with mainstream silicon technology and the long electron spin lifetime at room temperature. Moreover, the energy proximity between the direct and indirect bandgaps allows for optical spin injection and detection within the telecommunication window. In this letter, we demonstrate injection of pure spin currents (\textit{i.e.} with no associated transport of electric charges) in germanium, combined with non-local spin detection blocks at room temperature. Spin injection is performed either electrically through a magnetic tunnel junction (MTJ) or optically, exploiting the ability of lithographed nanostructures to manipulate the distribution of circularly-polarized light in the semiconductor. Pure spin current detection is achieved using either a MTJ or the inverse spin-Hall effect (ISHE) across a platinum stripe. These results broaden the palette of tools available for the realization of opto-spintronic devices., Comment: 14 pages and 5 figures
- Published
- 2017
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