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Your search keyword '"Delabie, Annelies"' showing total 5 results

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1. Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species.

2. The Importance of Moisture Control for EOT Scaling of Hf-Based Dielectrics.

3. Electrical Characteristics of 8-Å EOT Hf02/TaN Low Thermal-Budget n-Channel FETs With Solid-Phase Epitaxially Regrown Junctions.

4. Achieving Conduction Band-Edge Effective Work Functions by La203 Capping of Hafnium Silicates.

5. Hafnium oxide films by atomic layer deposition for high-κ gate dielectric applications: Analysis of the density of nanometer-thin films.

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