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High voltage switches capable of operating at high speeds with high current levels are used in a variety of applications in commercial and government systems. This paper discusses the fabrication and characterization of a novel micromachined planar triggered spark gap switch. The switch provides a low cost alternative to conventional triggered spark gap switches. The structure is designed for direct integration into the strip-line geometries used in a conventional capacitive discharge unit. The geometry of the device was selected to minimize parasitic impedances associated with conventional firing circuits. [ABSTRACT FROM PUBLISHER]

High-voltage switches capable of operating at high speeds and over a, wide range of voltages and energies are used in a wide variety of applications in material science and plasma physics. This paper discusses the fabrication and characterization of a novel high-voltage shock switch. The structure has been designed to operate as a fast-turn-on, low-impedance device. The switch is a planar structure that allows for direct integration into the stripline geometries used in a conventional capacitive discharge unit. [ABSTRACT FROM AUTHOR]